Smith, Matthew J., Sher, Meng-Ju, Franta, Benjamin, Lin, Yu-Ting, Mazur, Eric, Gradečak, Silvija (2014) Improving dopant incorporation during femtosecond-laser doping of Si with a Se thin-film dopant precursor. Applied Physics A, 114. 1009-1016 doi:10.1007/s00339-013-7673-8
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Improving dopant incorporation during femtosecond-laser doping of Si with a Se thin-film dopant precursor | ||
Journal | Applied Physics A | ||
Authors | Smith, Matthew J. | Author | |
Sher, Meng-Ju | Author | ||
Franta, Benjamin | Author | ||
Lin, Yu-Ting | Author | ||
Mazur, Eric | Author | ||
Gradečak, Silvija | Author | ||
Year | 2014 (March) | Volume | 114 |
Publisher | Springer Science and Business Media LLC | ||
DOI | doi:10.1007/s00339-013-7673-8Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 6016783 | Long-form Identifier | mindat:1:5:6016783:5 |
GUID | 0 | ||
Full Reference | Smith, Matthew J., Sher, Meng-Ju, Franta, Benjamin, Lin, Yu-Ting, Mazur, Eric, Gradečak, Silvija (2014) Improving dopant incorporation during femtosecond-laser doping of Si with a Se thin-film dopant precursor. Applied Physics A, 114. 1009-1016 doi:10.1007/s00339-013-7673-8 | ||
Plain Text | Smith, Matthew J., Sher, Meng-Ju, Franta, Benjamin, Lin, Yu-Ting, Mazur, Eric, Gradečak, Silvija (2014) Improving dopant incorporation during femtosecond-laser doping of Si with a Se thin-film dopant precursor. Applied Physics A, 114. 1009-1016 doi:10.1007/s00339-013-7673-8 | ||
In | (2014) Applied Physics A Vol. 114. Springer Science and Business Media LLC |
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