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Prüßing, Jan K., Böckendorf, Tim, Hamdana, Gerry, Peiner, Erwin, Bracht, Hartmut (2020) Defect distribution in boron doped silicon nanostructures characterized by means of scanning spreading resistance microscopy. Journal of Applied Physics, 127 (5). 55703pp. doi:10.1063/1.5134558

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Reference TypeJournal (article/letter/editorial)
TitleDefect distribution in boron doped silicon nanostructures characterized by means of scanning spreading resistance microscopy
JournalJournal of Applied Physics
AuthorsPrüßing, Jan K.Author
Böckendorf, TimAuthor
Hamdana, GerryAuthor
Peiner, ErwinAuthor
Bracht, HartmutAuthor
Year2020 (February 7)Volume127
Issue5
PublisherAIP Publishing
DOIdoi:10.1063/1.5134558Search in ResearchGate
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Mindat Ref. ID5213088Long-form Identifiermindat:1:5:5213088:1
GUID0
Full ReferencePrüßing, Jan K., Böckendorf, Tim, Hamdana, Gerry, Peiner, Erwin, Bracht, Hartmut (2020) Defect distribution in boron doped silicon nanostructures characterized by means of scanning spreading resistance microscopy. Journal of Applied Physics, 127 (5). 55703pp. doi:10.1063/1.5134558
Plain TextPrüßing, Jan K., Böckendorf, Tim, Hamdana, Gerry, Peiner, Erwin, Bracht, Hartmut (2020) Defect distribution in boron doped silicon nanostructures characterized by means of scanning spreading resistance microscopy. Journal of Applied Physics, 127 (5). 55703pp. doi:10.1063/1.5134558
In(2020, February) Journal of Applied Physics Vol. 127 (5) AIP Publishing

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Prüßing, Jan K., Hamdana, Gerry, Bougeard, Dominique, Peiner, Erwin, Bracht, Hartmut (2019) Quantitative scanning spreading resistance microscopy on n-type dopant diffusion profiles in germanium and the origin of dopant deactivation. Journal of Applied Physics, 125 (8). 85105pp. doi:10.1063/1.5066617
Prüßing, Jan K., Böckendorf, Tim, Kipke, Felix, Xu, Jiushuai, Puranto, Prabowo, Lundsgaard Hansen, John, Bougeard, Dominique, Peiner, Erwin, Bracht, Hartmut (2022) Retarded boron and phosphorus diffusion in silicon nanopillars due to stress induced vacancy injection. Journal of Applied Physics, 131 (7) 75702pp. doi:10.1063/5.0078006
Kipke, Felix, Südkamp, Tobias, Prüßing, Jan K., Bougeard, Dominique, Bracht, Hartmut (2020) Diffusion of boron in germanium at 800–900 °C revisited. Journal of Applied Physics, 127 (2). 25703pp. doi:10.1063/1.5134537
Südkamp, T., Hamdana, G., Descoins, M., Mangelinck, D., Wasisto, H. S., Peiner, E., Bracht, H. (2018) Self-diffusion in single crystalline silicon nanowires. Journal of Applied Physics, 123 (16). 161515pp. doi:10.1063/1.4996987
Bertke, Maik, Hamdana, Gerry, Wu, Wenze, Marks, Markus, Wasisto, Hutomo Suryo, Peiner, Erwin (2016) Asymmetric resonance frequency analysis of in-plane electrothermal silicon cantilevers for nanoparticle sensors. Journal of Physics: Conference Series, 757. 12006pp. doi:10.1088/1742-6596/757/1/012006
Puranto, Prabowo, Hamdana, Gerry, Pohlenz, Frank, Langfahl-Klabes, Jannick, Daul, Lars, Li, Zhi, Wasisto, Hutomo Suryo, Peiner, Erwin, Brand, Uwe (2019) Indentation modulus and hardness investigation of crystalline silicon surfaces treated by inductively coupled plasma reactive ion etching. Journal of Physics: Conference Series, 1319. 12008pp. doi:10.1088/1742-6596/1319/1/012008
Osterman, J., Hallén, A., Anand, S. (2002) Carrier profiling of Al-doped 4H-SiC by scanning spreading resistance microscopy. Applied Physics Letters, 81 (16). 3004-3006 doi:10.1063/1.1514829
Voss, S., Stolwijk, N. A., Bracht, H. (2002) Spreading-resistance profiling of silicon and germanium at variable temperature. Journal of Applied Physics, 92 (8). 4809-4819 doi:10.1063/1.1499544
Engst, C. R., Eisele, I., Kutter, C. (2020) Defect characterization of unannealed neutron transmutation doped silicon by means of deep temperature microwave detected photo induced current transient spectroscopy. Journal of Applied Physics, 127 (3). 35704pp. doi:10.1063/1.5134663
Jiang, C.-S.; Lott, H.; Mathew, A. T.; Nardone, M.; Colegrove, E.; Reese, M. O. (2025) Nm-scale electrical resistance imaging on CdTe by scanning spreading resistance microscopy. Applied Physics Letters, 127 (4). doi:10.1063/5.0268718
Pandey, Komal, Paredis, Kristof, Robson, Alexander J., Vandervorst, Wilfried (2020) Understanding the effect of confinement in scanning spreading resistance microscopy measurements. Journal of Applied Physics, 128 (3) 34303pp. doi:10.1063/5.0011703
 
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