Hönicke, P., Kayser, Y., Beckhoff, B., Müller, M., Dousse, J.-Cl., Hoszowska, J., Nowak, S. H. (2012) Characterization of ultra-shallow aluminum implants in silicon by grazing incidence and grazing emission X-ray fluorescence spectroscopy. Journal of Analytical Atomic Spectrometry, 27 (9). 1432pp. doi:10.1039/c2ja10385k
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Characterization of ultra-shallow aluminum implants in silicon by grazing incidence and grazing emission X-ray fluorescence spectroscopy | ||
| Journal | Journal of Analytical Atomic Spectrometry | ||
| Authors | Hönicke, P. | Author | |
| Kayser, Y. | Author | ||
| Beckhoff, B. | Author | ||
| Müller, M. | Author | ||
| Dousse, J.-Cl. | Author | ||
| Hoszowska, J. | Author | ||
| Nowak, S. H. | Author | ||
| Year | 2012 | Volume | 27 |
| Issue | 9 | ||
| Publisher | Royal Society of Chemistry (RSC) | ||
| DOI | doi:10.1039/c2ja10385kSearch in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5342007 | Long-form Identifier | mindat:1:5:5342007:3 |
| GUID | 0 | ||
| Full Reference | Hönicke, P., Kayser, Y., Beckhoff, B., Müller, M., Dousse, J.-Cl., Hoszowska, J., Nowak, S. H. (2012) Characterization of ultra-shallow aluminum implants in silicon by grazing incidence and grazing emission X-ray fluorescence spectroscopy. Journal of Analytical Atomic Spectrometry, 27 (9). 1432pp. doi:10.1039/c2ja10385k | ||
| Plain Text | Hönicke, P., Kayser, Y., Beckhoff, B., Müller, M., Dousse, J.-Cl., Hoszowska, J., Nowak, S. H. (2012) Characterization of ultra-shallow aluminum implants in silicon by grazing incidence and grazing emission X-ray fluorescence spectroscopy. Journal of Analytical Atomic Spectrometry, 27 (9). 1432pp. doi:10.1039/c2ja10385k | ||
| In | (2012) Journal of Analytical Atomic Spectrometry Vol. 27 (9) Royal Society of Chemistry (RSC) | ||
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