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Grob, A., Grob, J.J., Golanski, A. (1987) Damage created in silicon by BFn+ (1≤ n ≤ 3) and PFn+ (1⪯ n:≤ 5) implantations. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 55-60 doi:10.1016/s0168-583x(87)80014-9

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Reference TypeJournal (article/letter/editorial)
TitleDamage created in silicon by BFn+ (1≤ n ≤ 3) and PFn+ (1⪯ n:≤ 5) implantations
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsGrob, A.Author
Grob, J.J.Author
Golanski, A.Author
Year1987 (January)Volume19
PublisherElsevier BV
DOIdoi:10.1016/s0168-583x(87)80014-9Search in ResearchGate
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Mindat Ref. ID5587598Long-form Identifiermindat:1:5:5587598:5
GUID0
Full ReferenceGrob, A., Grob, J.J., Golanski, A. (1987) Damage created in silicon by BFn+ (1≤ n ≤ 3) and PFn+ (1⪯ n:≤ 5) implantations. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 55-60 doi:10.1016/s0168-583x(87)80014-9
Plain TextGrob, A., Grob, J.J., Golanski, A. (1987) Damage created in silicon by BFn+ (1≤ n ≤ 3) and PFn+ (1⪯ n:≤ 5) implantations. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 55-60 doi:10.1016/s0168-583x(87)80014-9
In(1987) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 19. Elsevier BV

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Maillet, S., Stuck, R., Grob, J.J., Golanski, A., Pantel, R., Perio, A. (1987) High temperature oxygen implantation in silicon: Soil structure formation characteristics. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 294-298 doi:10.1016/s0168-583x(87)80060-5
Grob, A., Grob, J.J., Siffert, P. (1992) Damage created in silicon by 1 MeV O+ ions as a function of beam power. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 62 (3). 309-313 doi:10.1016/0168-583x(92)95247-o
Golanski, A., Grob, A., Grob, J.J., Holland, O.W., Pennycook, S.J., White, C.W. (1992) Dynamics of lattice damage accumulation for MeV ions in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 62 (3). 365-371 doi:10.1016/0168-583x(92)95258-s
Grob, J.J., Unamuno, S., Grob, A., Ajaka, M., Slaoui, A., Stuck, R. (1987) Activation and diffusion during rapid thermal annealing of arsenic and boron implanted silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 501-506 doi:10.1016/s0168-583x(87)80100-3
Roqueta, F., Grob, A., Grob, J.J., Jérisian, R., Stoquert, J.P., Ventura, L. (1999) Stability of cavities formed by He+ implantation in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 147 (1). 298-303 doi:10.1016/s0168-583x(98)00538-2
Grob, A., Rohr, P., Mariani, G., Sevely, J., Grob, J.J. (1996) Kinetics of impurity gettering on buried defects created by MeV argon implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 112 (1). 169-172 doi:10.1016/0168-583x(95)01014-9
Gaboriaud, R.J., Grob, J.J., Abel, F. (1987) Ion beam induced atomic mixing in Fe-Al bilayered samples: RBS, TEM, in situ resistivity measurements and sims investigations. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 648-653 doi:10.1016/s0168-583x(87)80130-1
Grob, J.J., Grob, A., Thevenin, P., Siffert, P. (1988) Transverse straggling of MeV oxygen ions implanted in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 30 (1). 34-37 doi:10.1016/0168-583x(88)90075-4
Grob, A., Grob, J.J., Thévenin, P., Siffert, P. (1991) A dechanneling investigation of MeV oxygen implanted silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 58 (2). 236-241 doi:10.1016/0168-583x(91)95594-4
Roqueta, F, Ventura, L, Grob, J.J, Jérisian, R (2001) Lateral gettering of iron and platinum by cavities induced by helium implantation in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 178 (1). 184-187 doi:10.1016/s0168-583x(00)00485-7
(1987) Committees. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. doi:10.1016/s0168-583x(87)80003-4
 
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