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Servidori, M., Cannavò, S., Ferla, G., La Ferla, A., Campisano, S.U., Rimini, E. (1987) Hexagonal phase produced by hot implants in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 317-321 doi:10.1016/s0168-583x(87)80064-2

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Reference TypeJournal (article/letter/editorial)
TitleHexagonal phase produced by hot implants in silicon
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsServidori, M.Author
Cannavò, S.Author
Ferla, G.Author
La Ferla, A.Author
Campisano, S.U.Author
Rimini, E.Author
Year1987 (January)Volume19
PublisherElsevier BV
DOIdoi:10.1016/s0168-583x(87)80064-2Search in ResearchGate
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Mindat Ref. ID5587699Long-form Identifiermindat:1:5:5587699:3
GUID0
Full ReferenceServidori, M., Cannavò, S., Ferla, G., La Ferla, A., Campisano, S.U., Rimini, E. (1987) Hexagonal phase produced by hot implants in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 317-321 doi:10.1016/s0168-583x(87)80064-2
Plain TextServidori, M., Cannavò, S., Ferla, G., La Ferla, A., Campisano, S.U., Rimini, E. (1987) Hexagonal phase produced by hot implants in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 317-321 doi:10.1016/s0168-583x(87)80064-2
In(1987) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 19. Elsevier BV

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La Ferlai, A., Cannavòi, S., Ferlai, G., Campisano, S.U., Rimini, E., Servidori, M. (1987) Orientation and doping effects in ion beam annealing of α-silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 470-474 doi:10.1016/s0168-583x(87)80093-9
La Ferla, A., Rimini, E., Ciavola, G., Ferla, G. (1989) Very high energy implants of boron into silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 951-954 doi:10.1016/0168-583x(89)90332-7
Raineri, V., Galvagno, G., Rimini, E., La Ferla, A., Capizzi, S., Carnera, A., Ferla, G. (1991) Channeling implants of boron in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 661-665 doi:10.1016/0168-583x(91)96253-h
Galvagno, G., Scandurra, A., Raineri, V., Rimini, E., La Ferla, A., Sciascia, V., Frisina, F., Raspagliesi, M., Ferla, G. (1993) Implants of aluminum into silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 74 (1). 105-108 doi:10.1016/0168-583x(93)95023-x
La Ferla, A., Rimini, E., Carnera, A., Gasparotto, A., Ciavola, G., Ferla, G. (1991) Measurements and applications of high energy boron implants in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 561-564 doi:10.1016/0168-583x(91)96230-i
Borghesi, A., Guizzetti, G., Nosenzo, L., Stella, A., Campisano, S.U., Rimini, E. (1987) Optical study of high dose implanted, laser annealed silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 582-584 doi:10.1016/s0168-583x(87)80116-7
Gen Qing, Yang, Campisano, S.U., Rimini, E. (1987) Ion beam mixing in the AuCu-Al bilayer system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 623-625 doi:10.1016/s0168-583x(87)80125-8
La Ferla, A., Priolo, F., Spinella, C., Rimini, E., Baroetto, F., Ferla, G. (1989) Ion-beam-induced epitaxial crystallization of implanted and chemical vapor deposited amorphous silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 311-317 doi:10.1016/0168-583x(89)90794-5
Coffa, S., Tavolo, N., Frisina, F., Ferla, G., Campisano, S.U. (1993) Diffusion and lifetime engineering in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 74 (1). 47-52 doi:10.1016/0168-583x(93)95012-t
Coffa, S., Calcagno, L., Spinella, C., Campisano, S.U., Foti, G., Rimini, E. (1989) Rapid thermal annealing of hot implants in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 357-361 doi:10.1016/0168-583x(89)90802-1
Coffa, S., Calcagno, L., Calleri, G., Ferla, G., Campisano, S.U. (1989) Gold implantation in silicon: diffusion studies and device applications. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 296-298 doi:10.1016/0168-583x(89)90189-4
 
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