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Coffa, S., Calcagno, L., Calleri, G., Ferla, G., Campisano, S.U. (1989) Gold implantation in silicon: diffusion studies and device applications. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 296-298 doi:10.1016/0168-583x(89)90189-4

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Reference TypeJournal (article/letter/editorial)
TitleGold implantation in silicon: diffusion studies and device applications
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsCoffa, S.Author
Calcagno, L.Author
Calleri, G.Author
Ferla, G.Author
Campisano, S.U.Author
Year1989 (February)Volume37
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(89)90189-4Search in ResearchGate
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Mindat Ref. ID5592014Long-form Identifiermindat:1:5:5592014:2
GUID0
Full ReferenceCoffa, S., Calcagno, L., Calleri, G., Ferla, G., Campisano, S.U. (1989) Gold implantation in silicon: diffusion studies and device applications. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 296-298 doi:10.1016/0168-583x(89)90189-4
Plain TextCoffa, S., Calcagno, L., Calleri, G., Ferla, G., Campisano, S.U. (1989) Gold implantation in silicon: diffusion studies and device applications. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 296-298 doi:10.1016/0168-583x(89)90189-4
In(1989) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 37. Elsevier BV

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Coffa, S., Tavolo, N., Frisina, F., Ferla, G., Campisano, S.U. (1993) Diffusion and lifetime engineering in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 74 (1). 47-52 doi:10.1016/0168-583x(93)95012-t
Coffa, S., Calcagno, L., Spinella, C., Campisano, S.U., Foti, G., Rimini, E. (1989) Rapid thermal annealing of hot implants in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 357-361 doi:10.1016/0168-583x(89)90802-1
La Ferla, A., Rimini, E., Ciavola, G., Ferla, G. (1989) Very high energy implants of boron into silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 951-954 doi:10.1016/0168-583x(89)90332-7
Servidori, M., Cannavò, S., Ferla, G., La Ferla, A., Campisano, S.U., Rimini, E. (1987) Hexagonal phase produced by hot implants in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 317-321 doi:10.1016/s0168-583x(87)80064-2
Campisano, S.U., Coffa, S., Raineri, V., Priolo, F., Rimini, E. (1993) Mechanisms of amorphization in ion implanted crystalline silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 80. 514-518 doi:10.1016/0168-583x(93)96171-8
Coffa, S., Calcagno, L., Ferla, G., Campisano, S. U. (1990) Gold implantation inn‐type silicon: Entropy factor and diffusion studies. Journal of Applied Physics, 68 (4). 1601-1605 doi:10.1063/1.346638
Coffa, S., Calcagno, L., Campisano, S. U., Calleri, G., Ferla, G. (1988) Diffusion of ion‐implanted gold inp‐type silicon. Journal of Applied Physics, 64 (11). 6291-6295 doi:10.1063/1.342087
Campisano, S.U., Gyulai, J. (1992) Editorial. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 62 (3). doi:10.1016/0168-583x(92)95245-m
Priolo, F., Franzó, G., Coffa, S., Polman, A., Snoeks, E., van den Hoven, G.N., Libertino, S., Lombardo, S., Campisano, S.U., Carnera, A. (1996) Optical doping of materials by erbium ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 116 (1). 77-84 doi:10.1016/0168-583x(96)00014-6
Priolo, F., Poate, J.M., Jacobson, D.C., Batstone, J.L., Campisano, S.U. (1989) Radiation-enhanced diffusion of implanted impurities in amorphous Si. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 343-346 doi:10.1016/0168-583x(89)90799-4
(1989) Committees. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. doi:10.1016/0168-583x(89)90125-0
 
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