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Ruffell, John P., Douglas-Hamilton, D.H., Kaim, R.E., Izumi, K. (1987) A high current, high voltage oxygen ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 229-234 doi:10.1016/0168-583x(87)90833-0

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Reference TypeJournal (article/letter/editorial)
TitleA high current, high voltage oxygen ion implanter
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsRuffell, John P.Author
Douglas-Hamilton, D.H.Author
Kaim, R.E.Author
Izumi, K.Author
Year1987 (January)Volume21
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(87)90833-0Search in ResearchGate
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Mindat Ref. ID5588090Long-form Identifiermindat:1:5:5588090:5
GUID0
Full ReferenceRuffell, John P., Douglas-Hamilton, D.H., Kaim, R.E., Izumi, K. (1987) A high current, high voltage oxygen ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 229-234 doi:10.1016/0168-583x(87)90833-0
Plain TextRuffell, John P., Douglas-Hamilton, D.H., Kaim, R.E., Izumi, K. (1987) A high current, high voltage oxygen ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 229-234 doi:10.1016/0168-583x(87)90833-0
In(1987, January) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 21 (1) Elsevier BV

See Also

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Kaim, R.E., Douglas-Hamilton, D.H., Ruffell, John P. (1987) Acceleration column for a high current oxygen implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 321-323 doi:10.1016/0168-583x(87)90850-0
Douglas-Hamilton, D.H., Ruffell, John P., Kaim, R.E., Izumi, K. (1987) End station design and wafer quality control for a high current oxygen implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 324-327 doi:10.1016/0168-583x(87)90851-2
Benveniste, V. (1987) Wafer cooling in a high current ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 366-371 doi:10.1016/0168-583x(87)90858-5
Torii, Yasuhiro, Shimada, Masaru, Watanabe, Iwao (1987) Very high current ECR ion source for an oxygen ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 178-181 doi:10.1016/0168-583x(87)90820-2
Douglas-Hamilton, D.H., Dolan, Robert P., Friedman, Helen E. (1987) Layer thicknesses in oxygen implantation of silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 158-162 doi:10.1016/0168-583x(87)90817-2
Komatsu, K., Yui, K., Terasawa, T., Niikura, K., Kouno, E., Komiya, S. (1987) A high throughput end station of a high current ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 317-320 doi:10.1016/0168-583x(87)90849-4
Nakashima, S., Izumi, K. (1991) SIMOX wafers with low dislocation density produced by a 100-mA-class high-current oxygen implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 847-851 doi:10.1016/0168-583x(91)96291-r
Komatsu, K., Takagi, K., Tsukakoshi, O., Katagawa, T., Kouno, E., Komiya, S. (1987) High current ion implanter aimed at clean and dust-free production. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 235-238 doi:10.1016/0168-583x(87)90834-2
Jiang, Xin Yuan, Lu Shi Wan, , Shi Zhi Zu, (1987) A 600 keV research heavy ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 310-313 doi:10.1016/0168-583x(87)90847-0
(1987) Committees. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). doi:10.1016/0168-583x(87)90802-0
O'Connor, John P., Joyce, Leo F. (1987) A high current injector for tandem accelerators. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 334-338 doi:10.1016/0168-583x(87)90853-6
 
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