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Koudijs, R., Dubbelman, P., Urbanus, W.H., Bannenberg, J.G. (1987) A 1 and 2 MV ion implantation facility. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 296-299 doi:10.1016/0168-583x(87)90844-5

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Reference TypeJournal (article/letter/editorial)
TitleA 1 and 2 MV ion implantation facility
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsKoudijs, R.Author
Dubbelman, P.Author
Urbanus, W.H.Author
Bannenberg, J.G.Author
Year1987 (January)Volume21
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(87)90844-5Search in ResearchGate
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Mindat Ref. ID5588114Long-form Identifiermindat:1:5:5588114:4
GUID0
Full ReferenceKoudijs, R., Dubbelman, P., Urbanus, W.H., Bannenberg, J.G. (1987) A 1 and 2 MV ion implantation facility. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 296-299 doi:10.1016/0168-583x(87)90844-5
Plain TextKoudijs, R., Dubbelman, P., Urbanus, W.H., Bannenberg, J.G. (1987) A 1 and 2 MV ion implantation facility. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 296-299 doi:10.1016/0168-583x(87)90844-5
In(1987, January) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 21 (1) Elsevier BV

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Cleff, B., Schulte, W.-H., Schulze, H., Terlau, W., Koudijs, R., Dubbelman, P., Peters, H.J. (1985) A new 2 MV single-ended ion accelerator for ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 46-50 doi:10.1016/0168-583x(85)90608-1
Urbanus, W.H., Bannenberg, J.G., Doorn, S., Saris, F.W., Koudijs, R., Dubbelman, P., Koelewijn, W. (1989) Beam-envelope calculations of space-charge loaded beams in MeV dc ion-implantation facilities. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 281 (1). 28-36 doi:10.1016/0168-9002(89)91213-8
Urbanus, W.H., Bannenberg, J.G., Saris, F.W., Koudijs, R., Dubbelman, P., Koelewijn, W. (1989) Reduction of the X-ray level of dc ion accelerators. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 278 (2). 339-348 doi:10.1016/0168-9002(89)90849-8
Gibbons, James F. (1987) Historical perspectives on ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 83-89 doi:10.1016/0168-583x(87)90803-2
Sakudo, N. (1987) Microwave ion source for ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 168-177 doi:10.1016/0168-583x(87)90819-6
Wauk, M.T. (1987) New ion implantation system with advanced process capabilities. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 280-284 doi:10.1016/0168-583x(87)90842-1
(1987) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). doi:10.1016/0168-583x(87)90128-5
Koudijs, R. (1989) A new 500 kV ion accelerator for ion implantation and analyzing purposes. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 649-652 doi:10.1016/0168-583x(89)90268-1
Beery, J.G. (1987) Ion beam characterization of laser mirrors. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 24. 603-607 doi:10.1016/0168-583x(87)90719-1
Smith, T.C. (1987) Status of IC applications of ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 90-95 doi:10.1016/0168-583x(87)90804-4
Seidel, T.E. (1987) CMOS process review with implications for ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 96-103 doi:10.1016/0168-583x(87)90805-6
 
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