Hall, J.Michael, Glawischnig, H., Holtschmidt, W. (1987) Charging studies in applied materials precision implant 9000 system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 350-353 doi:10.1016/0168-583x(87)90855-x
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Charging studies in applied materials precision implant 9000 system | ||
Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
Authors | Hall, J.Michael | Author | |
Glawischnig, H. | Author | ||
Holtschmidt, W. | Author | ||
Year | 1987 (January) | Volume | 21 |
Issue | 1 | ||
Publisher | Elsevier BV | ||
DOI | doi:10.1016/0168-583x(87)90855-xSearch in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5588136 | Long-form Identifier | mindat:1:5:5588136:6 |
GUID | 0 | ||
Full Reference | Hall, J.Michael, Glawischnig, H., Holtschmidt, W. (1987) Charging studies in applied materials precision implant 9000 system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 350-353 doi:10.1016/0168-583x(87)90855-x | ||
Plain Text | Hall, J.Michael, Glawischnig, H., Holtschmidt, W. (1987) Charging studies in applied materials precision implant 9000 system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 350-353 doi:10.1016/0168-583x(87)90855-x | ||
In | (1987, January) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 21 (1) Elsevier BV |
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