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Southwood, P.D., Bright, N.J. (1987) Integrated factory interface for the precision implant 9000 ion implanter operator. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 514-517 doi:10.1016/0168-583x(87)90893-7

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Reference TypeJournal (article/letter/editorial)
TitleIntegrated factory interface for the precision implant 9000 ion implanter operator
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsSouthwood, P.D.Author
Bright, N.J.Author
Year1987 (January)Volume21
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(87)90893-7Search in ResearchGate
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Mindat Ref. ID5588213Long-form Identifiermindat:1:5:5588213:4
GUID0
Full ReferenceSouthwood, P.D., Bright, N.J. (1987) Integrated factory interface for the precision implant 9000 ion implanter operator. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 514-517 doi:10.1016/0168-583x(87)90893-7
Plain TextSouthwood, P.D., Bright, N.J. (1987) Integrated factory interface for the precision implant 9000 ion implanter operator. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 514-517 doi:10.1016/0168-583x(87)90893-7
In(1987, January) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 21 (1) Elsevier BV

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Aitken, D. (1987) The precision implant 9000 beam line. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 274-279 doi:10.1016/0168-583x(87)90841-x
Hall, J.Michael, Glawischnig, H., Holtschmidt, W. (1987) Charging studies in applied materials precision implant 9000 system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 350-353 doi:10.1016/0168-583x(87)90855-x
Steen, L.S., Hall, J.Michael, Aitken, D., Plumb, F.G., Wauk, M.T., Bright, N., Pruitt, C., Robinson, L. (1987) The precision implant 9000, a new concept in ion implantation systems. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 328-333 doi:10.1016/0168-583x(87)90852-4
Benveniste, V. (1987) Wafer cooling in a high current ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 366-371 doi:10.1016/0168-583x(87)90858-5
Torii, Yasuhiro, Shimada, Masaru, Watanabe, Iwao (1987) Very high current ECR ion source for an oxygen ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 178-181 doi:10.1016/0168-583x(87)90820-2
(1987) Committees. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). doi:10.1016/0168-583x(87)90130-3
(1987) Committees. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). doi:10.1016/0168-583x(87)90802-0
Milgate, R., Simonton, R. (1987) Recent improvements in the particle performance of a varian 350D ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 381-384 doi:10.1016/0168-583x(87)90861-5
Jiang, Xin Yuan, Lu Shi Wan, , Shi Zhi Zu, (1987) A 600 keV research heavy ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 310-313 doi:10.1016/0168-583x(87)90847-0
Scaife, William (1987) The Veeco 4840 automated implant system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 258-263 doi:10.1016/0168-583x(87)90838-x
(1987) Committee. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 22 (1). doi:10.1016/0168-583x(87)90283-7
 
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