Log InRegister
Quick Links : The Mindat ManualThe Rock H. Currier Digital LibraryMindat Newsletter [Free Download]
Home PageAbout MindatThe Mindat ManualHistory of MindatCopyright StatusWho We AreContact UsAdvertise on Mindat
Donate to MindatCorporate SponsorshipSponsor a PageSponsored PagesMindat AdvertisersAdvertise on Mindat
Learning CenterWhat is a mineral?The most common minerals on earthInformation for EducatorsMindat ArticlesThe ElementsThe Rock H. Currier Digital LibraryGeologic Time
Minerals by PropertiesMinerals by ChemistryAdvanced Locality SearchRandom MineralRandom LocalitySearch by minIDLocalities Near MeSearch ArticlesSearch GlossaryMore Search Options
Search For:
Mineral Name:
Locality Name:
Keyword(s):
 
The Mindat ManualAdd a New PhotoRate PhotosLocality Edit ReportCoordinate Completion ReportAdd Glossary Item
Mining CompaniesStatisticsUsersMineral MuseumsClubs & OrganizationsMineral Shows & EventsThe Mindat DirectoryDevice SettingsThe Mineral Quiz
Photo SearchPhoto GalleriesSearch by ColorNew Photos TodayNew Photos YesterdayMembers' Photo GalleriesPast Photo of the Day GalleryPhotography

Basra, Vijay K., McKenna, Charles M., Felch, Susan B. (1987) A study of wafer and device charging during high current ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 360-365 doi:10.1016/0168-583x(87)90857-3

Advanced
   -   Only viewable:
Reference TypeJournal (article/letter/editorial)
TitleA study of wafer and device charging during high current ion implantation
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsBasra, Vijay K.Author
McKenna, Charles M.Author
Felch, Susan B.Author
Year1987 (January)Volume21
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(87)90857-3Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5588140Long-form Identifiermindat:1:5:5588140:9
GUID0
Full ReferenceBasra, Vijay K., McKenna, Charles M., Felch, Susan B. (1987) A study of wafer and device charging during high current ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 360-365 doi:10.1016/0168-583x(87)90857-3
Plain TextBasra, Vijay K., McKenna, Charles M., Felch, Susan B. (1987) A study of wafer and device charging during high current ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 360-365 doi:10.1016/0168-583x(87)90857-3
In(1987, January) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 21 (1) Elsevier BV

See Also

These are possibly similar items as determined by title/reference text matching only.

Benveniste, V. (1987) Wafer cooling in a high current ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 366-371 doi:10.1016/0168-583x(87)90858-5
Thayer, R.Bruce (1987) XP series high current ion implantation systems for up to 200 mm wafer processing. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 245-250 doi:10.1016/0168-583x(87)90836-6
Liebert, Reuel B., Downey, Daniel F., Basra, Vijay K. (1987) Planar channeling effects in a batch process ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 391-395 doi:10.1016/0168-583x(87)90863-9
Brown, Ian, Washburn, Jack (1987) The MEVVA ion source for high current metal ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 201-204 doi:10.1016/0168-583x(87)90826-3
Outcault, R., McKenna, C., Robertson, T., Biondo, L. (1987) A new computer designed faraday system for high current ion implantation systems. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 354-359 doi:10.1016/0168-583x(87)90856-1
Current, M.I., Bhattacharyya, A., Khid, M. (1989) Control of surface charging during high current ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 555-558 doi:10.1016/0168-583x(89)90245-0
Basra, Vijay K., Downey, Daniel F. (1987) RTP shallow junction formation of low energy boron implants into preamorphized silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 505-508 doi:10.1016/0168-583x(87)90891-3
Sakudo, N. (1987) Microwave ion source for ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 168-177 doi:10.1016/0168-583x(87)90819-6
Wonson, C., Thompson, T. (1987) Intelligent performance optimization for a fully automatic high current ion implantation system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 523-525 doi:10.1016/0168-583x(87)90896-2
(1987) Committees. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). doi:10.1016/0168-583x(87)90130-3
Dearnaley, G. (1987) IOn implantation part II: Ion implantation in nonelectronic materials. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 24. 506-511 doi:10.1016/0168-583x(87)90696-3
 
and/or  
Mindat.org is an outreach project of the Hudson Institute of Mineralogy, a 501(c)(3) not-for-profit organization.
Copyright © mindat.org and the Hudson Institute of Mineralogy 1993-2025, except where stated. Most political location boundaries are Β© OpenStreetMap contributors. Mindat.org relies on the contributions of thousands of members and supporters. Founded in 2000 by Jolyon Ralph.
To cite: Ralph, J., Von Bargen, D., Martynov, P., Zhang, J., Que, X., Prabhu, A., Morrison, S. M., Li, W., Chen, W., & Ma, X. (2025). Mindat.org: The open access mineralogy database to accelerate data-intensive geoscience research. American Mineralogist, 110(6), 833–844. doi:10.2138/am-2024-9486.
Privacy Policy - Terms & Conditions - Contact Us / DMCA issues - Report a bug/vulnerability Current server date and time: August 31, 2025 07:59:15
Go to top of page