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Sosnowski, Marek, Guzinski, Miro, Cornely, Roy (1989) Atomic nitrogen generation system for reactive deposition of thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 870-873 doi:10.1016/0168-583x(89)90317-0

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Reference TypeJournal (article/letter/editorial)
TitleAtomic nitrogen generation system for reactive deposition of thin films
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsSosnowski, MarekAuthor
Guzinski, MiroAuthor
Cornely, RoyAuthor
Year1989 (February)Volume37
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(89)90317-0Search in ResearchGate
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Mindat Ref. ID5592272Long-form Identifiermindat:1:5:5592272:4
GUID0
Full ReferenceSosnowski, Marek, Guzinski, Miro, Cornely, Roy (1989) Atomic nitrogen generation system for reactive deposition of thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 870-873 doi:10.1016/0168-583x(89)90317-0
Plain TextSosnowski, Marek, Guzinski, Miro, Cornely, Roy (1989) Atomic nitrogen generation system for reactive deposition of thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 870-873 doi:10.1016/0168-583x(89)90317-0
In(1989) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 37. Elsevier BV

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Sosnowski, Marek, Yamada, Isao (1989) Deposition of thin films of copper on silicon substrates at low temperature by the ICB method. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 874-877 doi:10.1016/0168-583x(89)90318-2
Marek, Sosnowski, Isao, Yamada (1990) Ionized cluster beam deposition and thin insulating films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 46 (1). 397-404 doi:10.1016/0168-583x(90)90736-e
(1989) Committees. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. doi:10.1016/0168-583x(89)90125-0
(1989) Sponsors. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. doi:10.1016/0168-583x(89)90126-2
(1989) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. doi:10.1016/0168-583x(89)90122-5
(1989) Conference organization. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. doi:10.1016/0168-583x(89)90124-9
Takagi, T. (1989) Editorial. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. doi:10.1016/0168-583x(89)90123-7
Johnson, Erik (1989) Analytical techniques for thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 36 (2). 232-233 doi:10.1016/0168-583x(89)90590-9
Nolen, Jerry A. (1989) Commissioning experience with the largest superconducting cyclotron, the NSCL K800. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 40. 870-873 doi:10.1016/0168-583x(89)90496-5
(1989) Author index. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 979-994 doi:10.1016/0168-583x(89)90338-8
Kobayashi, N., Tanoue, H. (1989) Nitrogen ion implantation into ZrN thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 746-749 doi:10.1016/0168-583x(89)90889-6
 
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