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Renau, A., Mack, M.E., O'Connor, J.P., Tokoro, N. (1991) An analysis of vacuum effects on ion implanter performance. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 61-65 doi:10.1016/0168-583x(91)96136-9

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Reference TypeJournal (article/letter/editorial)
TitleAn analysis of vacuum effects on ion implanter performance
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsRenau, A.Author
Mack, M.E.Author
O'Connor, J.P.Author
Tokoro, N.Author
Year1991 (April)Volume55
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(91)96136-9Search in ResearchGate
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Mindat Ref. ID5596239Long-form Identifiermindat:1:5:5596239:7
GUID0
Full ReferenceRenau, A., Mack, M.E., O'Connor, J.P., Tokoro, N. (1991) An analysis of vacuum effects on ion implanter performance. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 61-65 doi:10.1016/0168-583x(91)96136-9
Plain TextRenau, A., Mack, M.E., O'Connor, J.P., Tokoro, N. (1991) An analysis of vacuum effects on ion implanter performance. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 61-65 doi:10.1016/0168-583x(91)96136-9
In(1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV

See Also

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Tokoro, N., O'Connor, J.P., Renau, A., Mack, M.E. (1991) The beam performance of the Genus G-1500 ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 434-438 doi:10.1016/0168-583x(91)96207-2
O'Connor, John P., Mack, Michael E., Renau, Anthony, Tokoro, Nobuhiro (1991) The use of negative ions to enhance beam currents at low energies in an MeV ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 207-210 doi:10.1016/0168-583x(91)96163-f
Cherekdjian, S., Weisenberger, W. (1991) Daily 2 Γ— 1012 monitoring of an ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 178-182 doi:10.1016/0168-583x(91)96157-g
Pippins, Michael W. (1991) A system and performance overview of the EXTRION 220 medium-current ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 423-427 doi:10.1016/0168-583x(91)96205-y
Mihara, Y., Niikura, K., Tsukakoshi, O., Sakurada, Y. (1991) Parallel beam ion implanter: IPX-7000. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 417-422 doi:10.1016/0168-583x(91)96204-x
Howard, Kenneth (1991) Implant uniformity evaluation using a Varian/Extrion scan compensator module on an electrostatic scanning ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 202-206 doi:10.1016/0168-583x(91)96162-e
(1991) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 61 (1). doi:10.1016/0168-583x(91)95551-n
Sinclair, Frank (1991) Simulation of the geometrical characteristics of a mechanically scanned high current implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 482-487 doi:10.1016/0168-583x(91)96217-9
Qihua, Zhao, Xinyuan, Jiang, Chenglu, Lin, Tanguy, Pierre (1991) Beam optics research for a 600 keV heavy ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 374-378 doi:10.1016/0168-583x(91)96197-s
Hucknall, D.J., Kuhn, M. (1991) Vacuum system design for ion implanters. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 439-442 doi:10.1016/0168-583x(91)96208-3
(1991) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). doi:10.1016/0168-583x(91)96122-2
 
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