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Keenan, W.A., Johnson, W.H., Hodul, D., Mordo, D. (1991) RTP temperature uniformity mapping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 269-274 doi:10.1016/0168-583x(91)96176-l

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Reference TypeJournal (article/letter/editorial)
TitleRTP temperature uniformity mapping
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsKeenan, W.A.Author
Johnson, W.H.Author
Hodul, D.Author
Mordo, D.Author
Year1991 (April)Volume55
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(91)96176-lSearch in ResearchGate
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Mindat Ref. ID5596319Long-form Identifiermindat:1:5:5596319:2
GUID0
Full ReferenceKeenan, W.A., Johnson, W.H., Hodul, D., Mordo, D. (1991) RTP temperature uniformity mapping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 269-274 doi:10.1016/0168-583x(91)96176-l
Plain TextKeenan, W.A., Johnson, W.H., Hodul, D., Mordo, D. (1991) RTP temperature uniformity mapping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 269-274 doi:10.1016/0168-583x(91)96176-l
In(1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV

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Keenan, W.A., Johnson, W.H., Yarling, C.B. (1991) Comparison of modern uniformity-mapping techniques. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 230-234 doi:10.1016/0168-583x(91)96168-k
Keenan, W.A., Johnson, W.H., Mantalas, L., Nguyen, L., Larson, L.A. (1991) A micro-uniformity test structure. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 166-172 doi:10.1016/0168-583x(91)96155-e
Larson, L.A., Keenan, W.A., Johnson, W.H. (1991) Ion implant standard. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 275-280 doi:10.1016/0168-583x(91)96177-m
Yarling, C.B., Keenan, W.A., Larson, L.A. (1991) The history of uniformity mapping in ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 235-242 doi:10.1016/0168-583x(91)96169-l
Johnson, W.H., Keenan, W.A., Wetteroth, T. (1991) Gauge-capability study of ion-implant monitors. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 148-153 doi:10.1016/0168-583x(91)96152-b
Deming, R.O., Keenan, W.A. (1985) Cî—¸V Uniformity measurements. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 349-356 doi:10.1016/0168-583x(85)90656-1
Current, Michael I., Guitner, Tim, Ohno, Naotsugu, Hurley, Kurt, Keenan, W.A., Johnson, Walt, Hillard, R.J., Jeynes, C. (1991) Monitoring the micro-uniformity performance of a spinning disk implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 173-177 doi:10.1016/0168-583x(91)96156-f
Nagai, Nobuo (1991) Implant dose uniformity simulation program. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 253-256 doi:10.1016/0168-583x(91)96172-h
(1991) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). doi:10.1016/0168-583x(91)96122-2
(1991) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 56. doi:10.1016/0168-583x(91)95948-d
Stephens, K.G. (1991) Editorial. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). doi:10.1016/0168-583x(91)96123-3
 
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