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Yarling, C.B., Keenan, W.A., Larson, L.A. (1991) The history of uniformity mapping in ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 235-242 doi:10.1016/0168-583x(91)96169-l

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Reference TypeJournal (article/letter/editorial)
TitleThe history of uniformity mapping in ion implantation
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsYarling, C.B.Author
Keenan, W.A.Author
Larson, L.A.Author
Year1991 (April)Volume55
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(91)96169-lSearch in ResearchGate
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Mindat Ref. ID5596305Long-form Identifiermindat:1:5:5596305:9
GUID0
Full ReferenceYarling, C.B., Keenan, W.A., Larson, L.A. (1991) The history of uniformity mapping in ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 235-242 doi:10.1016/0168-583x(91)96169-l
Plain TextYarling, C.B., Keenan, W.A., Larson, L.A. (1991) The history of uniformity mapping in ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 235-242 doi:10.1016/0168-583x(91)96169-l
In(1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV

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Keenan, W.A., Johnson, W.H., Yarling, C.B. (1991) Comparison of modern uniformity-mapping techniques. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 230-234 doi:10.1016/0168-583x(91)96168-k
Larson, L.A., Keenan, W.A., Johnson, W.H. (1991) Ion implant standard. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 275-280 doi:10.1016/0168-583x(91)96177-m
Keenan, W.A., Johnson, W.H., Mantalas, L., Nguyen, L., Larson, L.A. (1991) A micro-uniformity test structure. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 166-172 doi:10.1016/0168-583x(91)96155-e
Keenan, W.A., Johnson, W.H., Hodul, D., Mordo, D. (1991) RTP temperature uniformity mapping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 269-274 doi:10.1016/0168-583x(91)96176-l
Johnson, W.H., Keenan, W.A., Wetteroth, T. (1991) Gauge-capability study of ion-implant monitors. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 148-153 doi:10.1016/0168-583x(91)96152-b
Yarling, C.B., Nunes, J., Chereckdjian, S. (1993) Statistical process analysis of ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 74 (1). 252-256 doi:10.1016/0168-583x(93)95054-9
Yarling, C.B., Andrew Keenan, W. (1989) Ion implant rapid thermal anneal international round robin. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 828-832 doi:10.1016/0168-583x(89)90307-8
Yarling, C., Eddy, R., Turner, J. (1991) Implantation-equipment data management for cost reduction, equipment optimization and process enhancement. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 104-108 doi:10.1016/0168-583x(91)96145-b
Deming, R.O., Keenan, W.A. (1985) Cî—¸V Uniformity measurements. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 349-356 doi:10.1016/0168-583x(85)90656-1
Hill, Chris, Hunt, Peter (1991) Ion implantation in bipolar technology. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 1-8 doi:10.1016/0168-583x(91)96125-5
Crook, J.Philip, Current, Michael I., Adibi, Babak, Leung, S., Larson, L.A. (1991) Custom profiles by automated multi-step implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 593-597 doi:10.1016/0168-583x(91)96238-g
 
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