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Crook, J.Philip, Current, Michael I., Adibi, Babak, Leung, S., Larson, L.A. (1991) Custom profiles by automated multi-step implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 593-597 doi:10.1016/0168-583x(91)96238-g

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Reference TypeJournal (article/letter/editorial)
TitleCustom profiles by automated multi-step implantation
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsCrook, J.PhilipAuthor
Current, Michael I.Author
Adibi, BabakAuthor
Leung, S.Author
Larson, L.A.Author
Year1991 (April)Volume55
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(91)96238-gSearch in ResearchGate
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Mindat Ref. ID5596445Long-form Identifiermindat:1:5:5596445:6
GUID0
Full ReferenceCrook, J.Philip, Current, Michael I., Adibi, Babak, Leung, S., Larson, L.A. (1991) Custom profiles by automated multi-step implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 593-597 doi:10.1016/0168-583x(91)96238-g
Plain TextCrook, J.Philip, Current, Michael I., Adibi, Babak, Leung, S., Larson, L.A. (1991) Custom profiles by automated multi-step implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 593-597 doi:10.1016/0168-583x(91)96238-g
In(1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV

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Yarling, C.B., Keenan, W.A., Larson, L.A. (1991) The history of uniformity mapping in ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 235-242 doi:10.1016/0168-583x(91)96169-l
Current, M.I., Inoue, M., Nakashima, S., Ohno, N., Kuribara, M., Matsunaga, Y., Hara, T., Wagner, D., Leung, S., Adibi, B., Lecouras, G., Larson, L.A., Prussin, S. (1993) Defect engineering of p+-junctions by multiple-species ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 74 (1). 175-180 doi:10.1016/0168-583x(93)95038-7
Larson, L.A., Keenan, W.A., Johnson, W.H. (1991) Ion implant standard. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 275-280 doi:10.1016/0168-583x(91)96177-m
Leung, Samuel, Adibi, Babak, Moffatt, Steve, Fishkin, Boris, Kinney, Pat (1991) Real time, in situ particle monitoring of the Applied Materials PI9200 ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 35-38 doi:10.1016/0168-583x(91)96131-4
Larson, L.A. (1991) A survey of implant particulate process control and yield effects. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 132-136 doi:10.1016/0168-583x(91)96149-f
Svensson, B.G., Mohadjeri, B. (1991) Isotope effects for ion-implantation profiles in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 650-654 doi:10.1016/0168-583x(91)96251-f
Seidel, Thomas E. (1991) Implantation in the 1990s. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 17-19 doi:10.1016/0168-583x(91)96127-7
(1991) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). doi:10.1016/0168-583x(91)96122-2
Bausells, J., Badenes, G., Lora-Tamayo, E. (1991) Calculation of channeling effects in ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 666-670 doi:10.1016/0168-583x(91)96254-i
Wauk, M.T., White, N., Adibi, B., Current, M., Strain, J. (1991) Charge neutralisation in the PI9000 series implanters. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 413-416 doi:10.1016/0168-583x(91)96203-w
Holmes, A.J.T., Proudfoot, G. (1991) Negative-ion sources for ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 323-327 doi:10.1016/0168-583x(91)96186-o
 
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