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Nagai, N., Kawai, T., Nogami, M., Shin'yama, T., Yuasa, T., Kibi, Y., Kawakami, H., Nishikawa, K., Isobe, M. (1991) The Nissin NH-20SP medium-current ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 393-397 doi:10.1016/0168-583x(91)96200-5

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Reference TypeJournal (article/letter/editorial)
TitleThe Nissin NH-20SP medium-current ion implanter
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsNagai, N.Author
Kawai, T.Author
Nogami, M.Author
Shin'yama, T.Author
Yuasa, T.Author
Kibi, Y.Author
Kawakami, H.Author
Nishikawa, K.Author
Isobe, M.Author
Year1991 (April)Volume55
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(91)96200-5Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5596368Long-form Identifiermindat:1:5:5596368:8
GUID0
Full ReferenceNagai, N., Kawai, T., Nogami, M., Shin'yama, T., Yuasa, T., Kibi, Y., Kawakami, H., Nishikawa, K., Isobe, M. (1991) The Nissin NH-20SP medium-current ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 393-397 doi:10.1016/0168-583x(91)96200-5
Plain TextNagai, N., Kawai, T., Nogami, M., Shin'yama, T., Yuasa, T., Kibi, Y., Kawakami, H., Nishikawa, K., Isobe, M. (1991) The Nissin NH-20SP medium-current ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 393-397 doi:10.1016/0168-583x(91)96200-5
In(1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV

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Tamura, Y., Nogami, M., Tanaka, M., Maeda, T., Kumasaki, H., Tamura, S. (1989) Production implanter Nissin NH-20SR. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 620-623 doi:10.1016/0168-583x(89)90261-9
Kawai, T., Chohtokudani, M., Naito, M., Hiramatsu, T., Sasaki, M., Sunouchi, T., Nishigami, Y., Matsumoto, T., Nakaya, M., Nakazawa, M. (1991) The Nissin PR-80A high current ion implantation system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 443-447 doi:10.1016/0168-583x(91)96209-4
Kawai, T., Naitoh, M., Nogami, M., Kinoyama, T., Nagai, N., Fujisawa, H. (1987) PR-80 high current ion implantation machine. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 239-244 doi:10.1016/0168-583x(87)90835-4
Matsuda, K., Kawai, T., Naitoh, M., Aoki, M. (1985) A high current ion implanter machine. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 35-38 doi:10.1016/0168-583x(85)90606-8
Nagai, N., Kawai, T., Naito, M., Nishigami, Y., Fujisawa, H., Nishikawa, K. (1989) Wafer chargeup study on the PR-80 high current ion implantation machine. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 572-575 doi:10.1016/0168-583x(89)90249-8
Pippins, Michael W. (1991) A system and performance overview of the EXTRION 220 medium-current ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 423-427 doi:10.1016/0168-583x(91)96205-y
Mihara, Y., Niikura, K., Tsukakoshi, O., Sakurada, Y. (1991) Parallel beam ion implanter: IPX-7000. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 417-422 doi:10.1016/0168-583x(91)96204-x
Nasser-Ghodsi, M., Farley, M., Grant, J., Bernhardt, D., Foley, M., Holden, S., Bowe, T., Singer, C., Dixit, K., Angel, G. (1991) A high-current ion implanter system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 398-407 doi:10.1016/0168-583x(91)96201-u
Inami, H., Inouchi, Y., Tanaka, H., Yamashita, T., Matsunaga, K., Matsuda, K. (1991) Development of a high current and high energy metal ion beam system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 370-373 doi:10.1016/0168-583x(91)96196-r
Matsuda, K., Kawai, T., Naito, M. (1989) High current implantation equipment. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 456-459 doi:10.1016/0168-583x(89)90223-1
(1991) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 54 (1). doi:10.1016/0168-583x(91)95476-t
 
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