Kawai, T., Chohtokudani, M., Naito, M., Hiramatsu, T., Sasaki, M., Sunouchi, T., Nishigami, Y., Matsumoto, T., Nakaya, M., Nakazawa, M. (1991) The Nissin PR-80A high current ion implantation system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 443-447 doi:10.1016/0168-583x(91)96209-4
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | The Nissin PR-80A high current ion implantation system | ||
| Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
| Authors | Kawai, T. | Author | |
| Chohtokudani, M. | Author | ||
| Naito, M. | Author | ||
| Hiramatsu, T. | Author | ||
| Sasaki, M. | Author | ||
| Sunouchi, T. | Author | ||
| Nishigami, Y. | Author | ||
| Matsumoto, T. | Author | ||
| Nakaya, M. | Author | ||
| Nakazawa, M. | Author | ||
| Year | 1991 (April) | Volume | 55 |
| Issue | 1 | ||
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/0168-583x(91)96209-4Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5596386 | Long-form Identifier | mindat:1:5:5596386:4 |
| GUID | 0 | ||
| Full Reference | Kawai, T., Chohtokudani, M., Naito, M., Hiramatsu, T., Sasaki, M., Sunouchi, T., Nishigami, Y., Matsumoto, T., Nakaya, M., Nakazawa, M. (1991) The Nissin PR-80A high current ion implantation system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 443-447 doi:10.1016/0168-583x(91)96209-4 | ||
| Plain Text | Kawai, T., Chohtokudani, M., Naito, M., Hiramatsu, T., Sasaki, M., Sunouchi, T., Nishigami, Y., Matsumoto, T., Nakaya, M., Nakazawa, M. (1991) The Nissin PR-80A high current ion implantation system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 443-447 doi:10.1016/0168-583x(91)96209-4 | ||
| In | (1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV | ||
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