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Yokota, Katsuhiro, Teramoto, Yuuki, Miyashita, Fumiyoshi (2007) Nitrogen ion energy dependencies of dielectric constants and compositions of barium carbide–barium nitrate mixed films deposited on silicon wafers by an ion beam assisted deposition technique. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 257 (1). 463-467 doi:10.1016/j.nimb.2007.01.066

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Reference TypeJournal (article/letter/editorial)
TitleNitrogen ion energy dependencies of dielectric constants and compositions of barium carbide–barium nitrate mixed films deposited on silicon wafers by an ion beam assisted deposition technique
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsYokota, KatsuhiroAuthor
Teramoto, YuukiAuthor
Miyashita, FumiyoshiAuthor
Year2007 (April)Volume257
Issue1
PublisherElsevier BV
DOIdoi:10.1016/j.nimb.2007.01.066Search in ResearchGate
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Mindat Ref. ID5636265Long-form Identifiermindat:1:5:5636265:5
GUID0
Full ReferenceYokota, Katsuhiro, Teramoto, Yuuki, Miyashita, Fumiyoshi (2007) Nitrogen ion energy dependencies of dielectric constants and compositions of barium carbide–barium nitrate mixed films deposited on silicon wafers by an ion beam assisted deposition technique. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 257 (1). 463-467 doi:10.1016/j.nimb.2007.01.066
Plain TextYokota, Katsuhiro, Teramoto, Yuuki, Miyashita, Fumiyoshi (2007) Nitrogen ion energy dependencies of dielectric constants and compositions of barium carbide–barium nitrate mixed films deposited on silicon wafers by an ion beam assisted deposition technique. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 257 (1). 463-467 doi:10.1016/j.nimb.2007.01.066
In(2007, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 257 (1) Elsevier BV

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Yokota, Katsuhiro, Kasuya, Tomohiko, Nakamura, Kazuhiro, Ohnishi, Masami, Miyashita, Fumiyoshi (2006) Ion beam current dependence of compositions and resistivities on titanium nitride films deposited onto silicon by an ion beam assisted deposition method. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 242 (1). 390-392 doi:10.1016/j.nimb.2005.08.171
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