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Yao, Yong, van Mourik, Martin W., Santhana Raman, P., van Kan, Jeroen A. (2013) Improved beam spot measurements in the 2nd generation proton beam writing system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 306. 265-270 doi:10.1016/j.nimb.2012.10.033

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Reference TypeJournal (article/letter/editorial)
TitleImproved beam spot measurements in the 2nd generation proton beam writing system
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsYao, YongAuthor
van Mourik, Martin W.Author
Santhana Raman, P.Author
van Kan, Jeroen A.Author
Year2013 (July)Volume306
PublisherElsevier BV
DOIdoi:10.1016/j.nimb.2012.10.033Search in ResearchGate
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Mindat Ref. ID5647526Long-form Identifiermindat:1:5:5647526:9
GUID0
Full ReferenceYao, Yong, van Mourik, Martin W., Santhana Raman, P., van Kan, Jeroen A. (2013) Improved beam spot measurements in the 2nd generation proton beam writing system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 306. 265-270 doi:10.1016/j.nimb.2012.10.033
Plain TextYao, Yong, van Mourik, Martin W., Santhana Raman, P., van Kan, Jeroen A. (2013) Improved beam spot measurements in the 2nd generation proton beam writing system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 306. 265-270 doi:10.1016/j.nimb.2012.10.033
In(2013) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 306. Elsevier BV

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Liu, Nannan, Santhana Raman, P., Xu, Xinxin, Tan, Huei Ming, Khursheed, Anjam, van Kan, Jeroen A. (2015) Development of ion sources: Towards high brightness for proton beam writing applications. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 348. 23-28 doi:10.1016/j.nimb.2015.01.017
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van Kan, J.A., Bettiol, A.A., Watt, F. (2007) Hydrogen silsesquioxane a next generation resist for proton beam writing at the 20nm level. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 260 (1). 396-399 doi:10.1016/j.nimb.2007.02.051
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