Bommali, R.K., Ghosh, S., Khan, S.A., Srivastava, P. (2018) Hydrogen loss and its improved retention in hydrogen plasma treated a -SiN x :H films: ERDA study with 100 MeV Ag 7+ ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 423. 16-21 doi:10.1016/j.nimb.2018.03.005
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Hydrogen loss and its improved retention in hydrogen plasma treated a -SiN x :H films: ERDA study with 100 MeV Ag 7+ ions | ||
Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
Authors | Bommali, R.K. | Author | |
Ghosh, S. | Author | ||
Khan, S.A. | Author | ||
Srivastava, P. | Author | ||
Year | 2018 (May) | Volume | 423 |
Publisher | Elsevier BV | ||
DOI | doi:10.1016/j.nimb.2018.03.005Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5655755 | Long-form Identifier | mindat:1:5:5655755:4 |
GUID | 0 | ||
Full Reference | Bommali, R.K., Ghosh, S., Khan, S.A., Srivastava, P. (2018) Hydrogen loss and its improved retention in hydrogen plasma treated a -SiN x :H films: ERDA study with 100 MeV Ag 7+ ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 423. 16-21 doi:10.1016/j.nimb.2018.03.005 | ||
Plain Text | Bommali, R.K., Ghosh, S., Khan, S.A., Srivastava, P. (2018) Hydrogen loss and its improved retention in hydrogen plasma treated a -SiN x :H films: ERDA study with 100 MeV Ag 7+ ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 423. 16-21 doi:10.1016/j.nimb.2018.03.005 | ||
In | (2018) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 423. Elsevier BV |
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