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Kanaya, K, Shimizu, K, Ishikawa, Y (1968) Scattering effects in ion beam exposure of photoresist polymer films. Journal of Physics D: Applied Physics, 1. 1657-1665 doi:10.1088/0022-3727/1/12/311

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Reference TypeJournal (article/letter/editorial)
TitleScattering effects in ion beam exposure of photoresist polymer films
JournalJournal of Physics D: Applied Physics
AuthorsKanaya, KAuthor
Shimizu, KAuthor
Ishikawa, YAuthor
Year1968 (December 1)Volume1
PublisherIOP Publishing
DOIdoi:10.1088/0022-3727/1/12/311Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5656175Long-form Identifiermindat:1:5:5656175:1
GUID0
Full ReferenceKanaya, K, Shimizu, K, Ishikawa, Y (1968) Scattering effects in ion beam exposure of photoresist polymer films. Journal of Physics D: Applied Physics, 1. 1657-1665 doi:10.1088/0022-3727/1/12/311
Plain TextKanaya, K, Shimizu, K, Ishikawa, Y (1968) Scattering effects in ion beam exposure of photoresist polymer films. Journal of Physics D: Applied Physics, 1. 1657-1665 doi:10.1088/0022-3727/1/12/311
In(1968) Journal of Physics D: Applied Physics Vol. 1. IOP Publishing

See Also

These are possibly similar items as determined by title/reference text matching only.

Holland, L (1969) Comments on the paper `Scattering effects in ion beam exposure of photoresist polymer films'. Journal of Physics D: Applied Physics, 2. 767 doi:10.1088/0022-3727/2/5/117
Kanaya, K, Shimizu, K, Ishikawa, Y (1969) Reply to Comments of Holland. Journal of Physics D: Applied Physics, 2. 767-768 doi:10.1088/0022-3727/2/5/118
Sugihara, K, Harada, Y, Yotsumoto, H, Fukami, A, Kanaya, K (1968) Scattering by specimen-supporting films in electron microscopy and its effect on Fresnel fringe formation. Journal of Physics D: Applied Physics, 1. 87-97 doi:10.1088/0022-3727/1/1/313
Shimizu, K, Kawakatsu, H, Kanaya, K (1975) Contamination layers formed by argon ion bombardment. Journal of Physics D: Applied Physics, 8. 1453-1459 doi:10.1088/0022-3727/8/13/006
Pal, A K, Barua, A K (1968) Intermolecular potentials and viscosities of some polar organic vapours. Journal of Physics D: Applied Physics, 1. 71-76 doi:10.1088/0022-3727/1/1/311
Wilson, G W (1968) Thermoelectric and mean free path effects in thin metal films. Journal of Physics D: Applied Physics, 1. 1837-1838 doi:10.1088/0022-3727/1/12/433
Rohatgi, V K (1968) Study of dense plasmas by double floating probe method. Journal of Physics D: Applied Physics, 1. 485-489 doi:10.1088/0022-3727/1/4/311
Hearne, K R, Rasul, M (1968) Column recovery of wall-stabilized d.c. arcs in air. Journal of Physics D: Applied Physics, 1. 343-349 doi:10.1088/0022-3727/1/3/311
Horie, Y (1968) A mechanism for shock-induced electrical polarization in water. Journal of Physics D: Applied Physics, 1. 1183-1190 doi:10.1088/0022-3727/1/9/311
Kanaya, K, Ono, S (1976) Consistent theory of electron scattering with atoms in electron microscopes. Journal of Physics D: Applied Physics, 9. 161-174 doi:10.1088/0022-3727/9/2/006
Evans, B L, Thompson, K T (1968) The photovoltage in thin crystals of MoS2. Journal of Physics D: Applied Physics, 1. 1619-1623 doi:10.1088/0022-3727/1/12/305
 
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