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Fernandez, D.A.R., Brito, B.S.S., Santos, I.A.D., Soares, V.F.D., Terto, A.R., de Oliveira, G.B., Hubler, R., Batista, W.W., Tentardini, E.K. (2020) Effect of hafnium contaminant present in zirconium targets on sputter deposited ZrN thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 462. 90-94 doi:10.1016/j.nimb.2019.11.005

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Reference TypeJournal (article/letter/editorial)
TitleEffect of hafnium contaminant present in zirconium targets on sputter deposited ZrN thin films
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsFernandez, D.A.R.Author
Brito, B.S.S.Author
Santos, I.A.D.Author
Soares, V.F.D.Author
Terto, A.R.Author
de Oliveira, G.B.Author
Hubler, R.Author
Batista, W.W.Author
Tentardini, E.K.Author
Year2020 (January)Volume462
PublisherElsevier BV
DOIdoi:10.1016/j.nimb.2019.11.005Search in ResearchGate
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Mindat Ref. ID5657948Long-form Identifiermindat:1:5:5657948:6
GUID0
Full ReferenceFernandez, D.A.R., Brito, B.S.S., Santos, I.A.D., Soares, V.F.D., Terto, A.R., de Oliveira, G.B., Hubler, R., Batista, W.W., Tentardini, E.K. (2020) Effect of hafnium contaminant present in zirconium targets on sputter deposited ZrN thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 462. 90-94 doi:10.1016/j.nimb.2019.11.005
Plain TextFernandez, D.A.R., Brito, B.S.S., Santos, I.A.D., Soares, V.F.D., Terto, A.R., de Oliveira, G.B., Hubler, R., Batista, W.W., Tentardini, E.K. (2020) Effect of hafnium contaminant present in zirconium targets on sputter deposited ZrN thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 462. 90-94 doi:10.1016/j.nimb.2019.11.005
In(2020) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 462. Elsevier BV

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