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Pastol, A, Catherine, Y (1990) Optical emission spectroscopy for diagnostic and monitoring of CH4plasmas used for a-C:H deposition. Journal of Physics D: Applied Physics, 23. 799-805 doi:10.1088/0022-3727/23/7/008

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Reference TypeJournal (article/letter/editorial)
TitleOptical emission spectroscopy for diagnostic and monitoring of CH4plasmas used for a-C:H deposition
JournalJournal of Physics D: Applied Physics
AuthorsPastol, AAuthor
Catherine, YAuthor
Year1990 (July 14)Volume23
PublisherIOP Publishing
DOIdoi:10.1088/0022-3727/23/7/008Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5663989Long-form Identifiermindat:1:5:5663989:4
GUID0
Full ReferencePastol, A, Catherine, Y (1990) Optical emission spectroscopy for diagnostic and monitoring of CH4plasmas used for a-C:H deposition. Journal of Physics D: Applied Physics, 23. 799-805 doi:10.1088/0022-3727/23/7/008
Plain TextPastol, A, Catherine, Y (1990) Optical emission spectroscopy for diagnostic and monitoring of CH4plasmas used for a-C:H deposition. Journal of Physics D: Applied Physics, 23. 799-805 doi:10.1088/0022-3727/23/7/008
In(1989) Journal of Physics D: Applied Physics Vol. 23. IOP Publishing

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Tochikubo, F, Kokubo, T, Kakuta, S, Suzuki, A, Makabe, T (1990) Investigation of the high-frequency glow discharge in Ar at 13.56 MHz by spatiotemporal optical emission spectroscopy. Journal of Physics D: Applied Physics, 23. 1184-1192 doi:10.1088/0022-3727/23/9/008
Lokhande, C D (1990) A chemical method for tin disulphide thin film deposition. Journal of Physics D: Applied Physics, 23. 1703-1705 doi:10.1088/0022-3727/23/12/032
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Despax, B, Cambril, E, Flouttard, J L, Akinnifesi, J (1990) Optical studies of gold-carbon plasma deposition. Journal of Physics D: Applied Physics, 23. 861-866 doi:10.1088/0022-3727/23/7/016
Ushiroda, S, Kajita, S, Kondo, Y (1990) Electron swarms in NF3-rare gas and NF3-N2mixtures. Journal of Physics D: Applied Physics, 23. 47-52 doi:10.1088/0022-3727/23/1/008
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Ray, A K, Hogarth, C A (1990) On the analysis of experimental data for optical absorption in non-crystalline materials. Journal of Physics D: Applied Physics, 23. 458-459 doi:10.1088/0022-3727/23/4/012
Tabata, A, Fujii, S, Suzuoki, Y, Mizutani, T, Ieda, M (1990) X-ray photoelectron spectroscopy (XPS) of hydrogenated amorphous silicon carbide (a-SixC1-x:H) prepared by the plasma CVD method. Journal of Physics D: Applied Physics, 23. 316-320 doi:10.1088/0022-3727/23/3/008
Mair, G L R (1990) A droplet emission mechanism in liquid metal anodes. Journal of Physics D: Applied Physics, 23. 1239-1243 doi:10.1088/0022-3727/23/9/016
Wautelet, M, Roos, A, Hanus, F (1990) Optical characteristics of laser-synthesised extended thin films of copper oxide. Journal of Physics D: Applied Physics, 23. 991-993 doi:10.1088/0022-3727/23/7/041
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