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Date, L, Radouane, K, Despax, B, Yousfi, M, Caquineau, H, Hennad, A (1999) Analysis of the N2O dissociation in a RF discharge reactor. Journal of Physics D: Applied Physics, 32. 1478-1488 doi:10.1088/0022-3727/32/13/307

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Reference TypeJournal (article/letter/editorial)
TitleAnalysis of the N2O dissociation in a RF discharge reactor
JournalJournal of Physics D: Applied Physics
AuthorsDate, LAuthor
Radouane, KAuthor
Despax, BAuthor
Yousfi, MAuthor
Caquineau, HAuthor
Hennad, AAuthor
Year1999 (July 7)Volume32
PublisherIOP Publishing
DOIdoi:10.1088/0022-3727/32/13/307Search in ResearchGate
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Mindat Ref. ID5667480Long-form Identifiermindat:1:5:5667480:6
GUID0
Full ReferenceDate, L, Radouane, K, Despax, B, Yousfi, M, Caquineau, H, Hennad, A (1999) Analysis of the N2O dissociation in a RF discharge reactor. Journal of Physics D: Applied Physics, 32. 1478-1488 doi:10.1088/0022-3727/32/13/307
Plain TextDate, L, Radouane, K, Despax, B, Yousfi, M, Caquineau, H, Hennad, A (1999) Analysis of the N2O dissociation in a RF discharge reactor. Journal of Physics D: Applied Physics, 32. 1478-1488 doi:10.1088/0022-3727/32/13/307
In(1999) Journal of Physics D: Applied Physics Vol. 32. IOP Publishing

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Radouane, K, Date, L, Yousfi, M, Despax, B, Caquineau, H (2000) RF discharge modelling in a N2O/SiH4mixture for SiO2deposition and comparison with experiment. Journal of Physics D: Applied Physics, 33. 1332-1341 doi:10.1088/0022-3727/33/11/312
Despax, B, Yousfi, M, Younis, G, Caquineau, H (2005) Power dissipation analysis in N2O/He RF discharges using particle modelling. Journal of Physics D: Applied Physics, 38. 4290-4295 doi:10.1088/0022-3727/38/24/004
Younis, G, Despax, B, Yousfi, M, Caquineau, H (2007) Power dissipation analysis in N2O RF discharges using Monte Carlo modelling. Journal of Physics D: Applied Physics, 40. 2045-2054 doi:10.1088/0022-3727/40/7/029
Yousfi, M, Hennad, A, Benhenni, M (2007) Swarm data of O−, NO−, He+, N2O+, and ions in N2O, He and N2O–He mixtures for PECVD applications. Journal of Physics D: Applied Physics, 40. 1751-1762 doi:10.1088/0022-3727/40/6/023
Mateev, Emil, Zhelyazkov, Ivan (1999) Macroscopic model for the energy balance of an asymmetric capacitively coupled rf discharge. Journal of Physics D: Applied Physics, 32. 3019-3024 doi:10.1088/0022-3727/32/23/307
Aubrecht, L, Koller, J, Zahoranova, A (1999) Trichel pulses in negative corona discharge on trees. Journal of Physics D: Applied Physics, 32. doi:10.1088/0022-3727/32/18/101
Kitayama, J, Kuzumoto, M (1999) Analysis of ozone generation from air in silent discharge. Journal of Physics D: Applied Physics, 32. 3032-3040 doi:10.1088/0022-3727/32/23/309
Laügt, M, Bousquet, V (1999) Optimizing scans on asymmetric reflections. Journal of Physics D: Applied Physics, 32. doi:10.1088/0022-3727/32/10a/307
Lisovskiy, V A, Yegorenkov, V D (1999) Electron-drift velocity determination in CF4and SF6in a strong electric field from breakdown curves of low-pressure RF discharge. Journal of Physics D: Applied Physics, 32. 2645-2648 doi:10.1088/0022-3727/32/20/310
Kondo, S, Nanbu, K (1999) A self-consistent numerical analysis of a planar dc magnetron discharge by the particle-in-cell/Monte Carlo method. Journal of Physics D: Applied Physics, 32. 1142-1152 doi:10.1088/0022-3727/32/10/311
Schweigert, I V, Alexandrov, A L (2012) Effect of nanoparticles on an rf discharge afterglow. Journal of Physics D: Applied Physics, 45. 325201pp. doi:10.1088/0022-3727/45/32/325201
 
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