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Duo, Xinzhong, Liu, Weili, Zhang, Miao, Wang, Lianwei, Lin, Chenglu, Okuyama, M, Noda, M, Cheung, Wing-Yiu, Chu, Paul K, Hu, Peigang, Wang, S X, Wang, L M (2001) Comparison between the different implantation orders in H+and He+coimplantation. Journal of Physics D: Applied Physics, 34. 477-482 doi:10.1088/0022-3727/34/4/306

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Reference TypeJournal (article/letter/editorial)
TitleComparison between the different implantation orders in H+and He+coimplantation
JournalJournal of Physics D: Applied Physics
AuthorsDuo, XinzhongAuthor
Liu, WeiliAuthor
Zhang, MiaoAuthor
Wang, LianweiAuthor
Lin, ChengluAuthor
Okuyama, MAuthor
Noda, MAuthor
Cheung, Wing-YiuAuthor
Chu, Paul KAuthor
Hu, PeigangAuthor
Wang, S XAuthor
Wang, L MAuthor
Year2001 (February 21)Volume34
PublisherIOP Publishing
DOIdoi:10.1088/0022-3727/34/4/306Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5668854Long-form Identifiermindat:1:5:5668854:4
GUID0
Full ReferenceDuo, Xinzhong, Liu, Weili, Zhang, Miao, Wang, Lianwei, Lin, Chenglu, Okuyama, M, Noda, M, Cheung, Wing-Yiu, Chu, Paul K, Hu, Peigang, Wang, S X, Wang, L M (2001) Comparison between the different implantation orders in H+and He+coimplantation. Journal of Physics D: Applied Physics, 34. 477-482 doi:10.1088/0022-3727/34/4/306
Plain TextDuo, Xinzhong, Liu, Weili, Zhang, Miao, Wang, Lianwei, Lin, Chenglu, Okuyama, M, Noda, M, Cheung, Wing-Yiu, Chu, Paul K, Hu, Peigang, Wang, S X, Wang, L M (2001) Comparison between the different implantation orders in H+and He+coimplantation. Journal of Physics D: Applied Physics, 34. 477-482 doi:10.1088/0022-3727/34/4/306
In(2000) Journal of Physics D: Applied Physics Vol. 34. IOP Publishing

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Duo, Xinzhong, Liu, Weili, Zhang, Miao, Wang, Lianwei, Lin, Chenglu, Okuyama, M., Noda, M., Cheung, Wing-Yiu, Wong, S. P., Chu, Paul K., Hu, Peigang, Wang, S. X., Wang, L. M. (2001) Evolution of hydrogen and helium co-implanted single-crystal silicon during annealing. Journal of Applied Physics, 90 (8). 3780-3786 doi:10.1063/1.1389478
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Liu, Weili, Zhang, Miao, Lin, Chenglu, Zeng, Zhaoming, Wang, Lianwei, Chu, Paul K. (2001) Intense blue-light emission from carbon-plasma-implanted porous silicon. Applied Physics Letters, 78 (1). 37-39 doi:10.1063/1.1337622
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Zhang, Miao, Lin, Chenglu, Duo, Xinzhong, Lin, Zixin, Zhou, Zuyao (1999) Comparison of Cu gettering to H+ and He+ implantation-induced cavities in separation-by-implantation-of-oxygen wafers. Journal of Applied Physics, 85 (1). 94-98 doi:10.1063/1.369426
Wan, Qing, Wang, Lianwei, Liu, Weili, Zhang, Miao, Lin, Chenglu (2001) Investigation of H+ and B+/H+ implantation in LiTaO3 single-crystals. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 184 (4). 531-535 doi:10.1016/s0168-583x(01)00827-8
Peng, X S, Meng, G W, Zhang, J, Zhao, L X, Wang, X F, Wang, Y W, Zhang, L D (2001) Electrochemical fabrication of ordered Bi2S3nanowire arrays. Journal of Physics D: Applied Physics, 34. 3224-3228 doi:10.1088/0022-3727/34/22/304
Zhang, S M, Liu, X H, Qin, X F, Wang, K M, Liu, X (2010) Damage, refractive index and near-field intensity profiles in a single-mode waveguide of LiNbO3by 400 keV He ion implantation. Journal of Physics D: Applied Physics, 43. 455303pp. doi:10.1088/0022-3727/43/45/455303
Wang, R S, Cheng, X Q, Lai, W S, Liu, B X (2001) Formation of YSi2-xlayers on Si by high-current Y ion implantation. Journal of Physics D: Applied Physics, 34. 2465-2468 doi:10.1088/0022-3727/34/16/310
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