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Sha-Li, Shi, Da-Peng, Chen, Yu-Peng, Jing, Yi, Ou, Tian-Chun, Ye, Qiu-Xia, Xu (2010) A novel method for sacrificial layer release in MEMS devices fabrication. Chinese Physics B, 19. 76802pp. doi:10.1088/1674-1056/19/7/076802

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Reference TypeJournal (article/letter/editorial)
TitleA novel method for sacrificial layer release in MEMS devices fabrication
JournalChinese Physics B
AuthorsSha-Li, ShiAuthor
Da-Peng, ChenAuthor
Yu-Peng, JingAuthor
Yi, OuAuthor
Tian-Chun, YeAuthor
Qiu-Xia, XuAuthor
Year2010 (July)Volume19
PublisherIOP Publishing
DOIdoi:10.1088/1674-1056/19/7/076802Search in ResearchGate
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Mindat Ref. ID6000503Long-form Identifiermindat:1:5:6000503:0
GUID0
Full ReferenceSha-Li, Shi, Da-Peng, Chen, Yu-Peng, Jing, Yi, Ou, Tian-Chun, Ye, Qiu-Xia, Xu (2010) A novel method for sacrificial layer release in MEMS devices fabrication. Chinese Physics B, 19. 76802pp. doi:10.1088/1674-1056/19/7/076802
Plain TextSha-Li, Shi, Da-Peng, Chen, Yu-Peng, Jing, Yi, Ou, Tian-Chun, Ye, Qiu-Xia, Xu (2010) A novel method for sacrificial layer release in MEMS devices fabrication. Chinese Physics B, 19. 76802pp. doi:10.1088/1674-1056/19/7/076802
In(n.d.) Chinese Physics B Vol. 19. IOP Publishing

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