| Reference Type | Journal (article/letter/editorial) |
|---|
| Title | Nano-scale gap filling and mechanism of deposit—etch—deposit process for phase-change material |
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| Journal | Chinese Physics B |
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| Authors | Ren, Wan-Chun | Author |
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| Liu, Bo | Author |
| Song, Zhi-Tang | Author |
| Xiang, Yang-Hui | Author |
| Wang, Zong-Tao | Author |
| Zhang, Bei-Chao | Author |
| Feng, Song-Lin | Author |
| Year | 2012 (November) | Volume | 21 |
|---|
| Publisher | IOP Publishing |
|---|
| DOI | doi:10.1088/1674-1056/21/11/115203Search in ResearchGate |
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| Generate Citation Formats |
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| Mindat Ref. ID | 6002015 | Long-form Identifier | mindat:1:5:6002015:4 |
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|
| GUID | 0 |
|---|
| Full Reference | Ren, Wan-Chun, Liu, Bo, Song, Zhi-Tang, Xiang, Yang-Hui, Wang, Zong-Tao, Zhang, Bei-Chao, Feng, Song-Lin (2012) Nano-scale gap filling and mechanism of deposit—etch—deposit process for phase-change material. Chinese Physics B, 21. 115203pp. doi:10.1088/1674-1056/21/11/115203 |
|---|
| Plain Text | Ren, Wan-Chun, Liu, Bo, Song, Zhi-Tang, Xiang, Yang-Hui, Wang, Zong-Tao, Zhang, Bei-Chao, Feng, Song-Lin (2012) Nano-scale gap filling and mechanism of deposit—etch—deposit process for phase-change material. Chinese Physics B, 21. 115203pp. doi:10.1088/1674-1056/21/11/115203 |
|---|
| In | (n.d.) Chinese Physics B Vol. 21. IOP Publishing |
|---|
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