Gosset, L.G., Damlencourt, J.-F., Renault, O., Rouchon, D., Holliger, Ph., Ermolieff, A., Trimaille, I., Ganem, J.-J., Martin, F., Séméria, M.-N. (2002) Interface and material characterization of thin Al2O3 layers deposited by ALD using TMA/H2O. Journal of Non-Crystalline Solids, 303 (1) 17-23 doi:10.1016/s0022-3093(02)00958-4
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Interface and material characterization of thin Al2O3 layers deposited by ALD using TMA/H2O | ||
| Journal | Journal of Non-Crystalline Solids | ||
| Authors | Gosset, L.G. | Author | |
| Damlencourt, J.-F. | Author | ||
| Renault, O. | Author | ||
| Rouchon, D. | Author | ||
| Holliger, Ph. | Author | ||
| Ermolieff, A. | Author | ||
| Trimaille, I. | Author | ||
| Ganem, J.-J. | Author | ||
| Martin, F. | Author | ||
| Séméria, M.-N. | Author | ||
| Year | 2002 (May) | Volume | 303 |
| Issue | 1 | ||
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/s0022-3093(02)00958-4Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 640422 | Long-form Identifier | mindat:1:5:640422:6 |
| GUID | 0 | ||
| Full Reference | Gosset, L.G., Damlencourt, J.-F., Renault, O., Rouchon, D., Holliger, Ph., Ermolieff, A., Trimaille, I., Ganem, J.-J., Martin, F., Séméria, M.-N. (2002) Interface and material characterization of thin Al2O3 layers deposited by ALD using TMA/H2O. Journal of Non-Crystalline Solids, 303 (1) 17-23 doi:10.1016/s0022-3093(02)00958-4 | ||
| Plain Text | Gosset, L.G., Damlencourt, J.-F., Renault, O., Rouchon, D., Holliger, Ph., Ermolieff, A., Trimaille, I., Ganem, J.-J., Martin, F., Séméria, M.-N. (2002) Interface and material characterization of thin Al2O3 layers deposited by ALD using TMA/H2O. Journal of Non-Crystalline Solids, 303 (1) 17-23 doi:10.1016/s0022-3093(02)00958-4 | ||
| In | (2002, May) Journal of Non-Crystalline Solids Vol. 303 (1) Elsevier BV | ||
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