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Li, Zhongwen, Gu, Le, Tang, Guangze, Ma, Xinxin, Sun, Mingren, Wang, Liqin (2011) Phase evolution of tantalum nitride and tantalum carbide films with PBII parameters. Rare Metals, 30. 142-145 doi:10.1007/s12598-011-0213-9

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Reference TypeJournal (article/letter/editorial)
TitlePhase evolution of tantalum nitride and tantalum carbide films with PBII parameters
JournalRare Metals
AuthorsLi, ZhongwenAuthor
Gu, LeAuthor
Tang, GuangzeAuthor
Ma, XinxinAuthor
Sun, MingrenAuthor
Wang, LiqinAuthor
Year2011 (April)Volume30
PublisherSpringer Science and Business Media LLC
DOIdoi:10.1007/s12598-011-0213-9Search in ResearchGate
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Mindat Ref. ID8049058Long-form Identifiermindat:1:5:8049058:2
GUID0
Full ReferenceLi, Zhongwen, Gu, Le, Tang, Guangze, Ma, Xinxin, Sun, Mingren, Wang, Liqin (2011) Phase evolution of tantalum nitride and tantalum carbide films with PBII parameters. Rare Metals, 30. 142-145 doi:10.1007/s12598-011-0213-9
Plain TextLi, Zhongwen, Gu, Le, Tang, Guangze, Ma, Xinxin, Sun, Mingren, Wang, Liqin (2011) Phase evolution of tantalum nitride and tantalum carbide films with PBII parameters. Rare Metals, 30. 142-145 doi:10.1007/s12598-011-0213-9
In(2011) Rare Metals Vol. 30. Springer Science and Business Media LLC

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