Feng, Xingguo, Tang, Guangze, Sun, Mingren, Ma, Xinxin, Wang, Liqin (2013) Chemical state and phase structure of (TaNbTiW)N films prepared by combined magnetron sputtering and PBII. Applied Surface Science, 280. 388-393 doi:10.1016/j.apsusc.2013.05.001
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Chemical state and phase structure of (TaNbTiW)N films prepared by combined magnetron sputtering and PBII | ||
Journal | Applied Surface Science | ||
Authors | Feng, Xingguo | Author | |
Tang, Guangze | Author | ||
Sun, Mingren | Author | ||
Ma, Xinxin | Author | ||
Wang, Liqin | Author | ||
Year | 2013 (September) | Volume | 280 |
Publisher | Elsevier BV | ||
DOI | doi:10.1016/j.apsusc.2013.05.001Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 9920977 | Long-form Identifier | mindat:1:5:9920977:9 |
GUID | 0 | ||
Full Reference | Feng, Xingguo, Tang, Guangze, Sun, Mingren, Ma, Xinxin, Wang, Liqin (2013) Chemical state and phase structure of (TaNbTiW)N films prepared by combined magnetron sputtering and PBII. Applied Surface Science, 280. 388-393 doi:10.1016/j.apsusc.2013.05.001 | ||
Plain Text | Feng, Xingguo, Tang, Guangze, Sun, Mingren, Ma, Xinxin, Wang, Liqin (2013) Chemical state and phase structure of (TaNbTiW)N films prepared by combined magnetron sputtering and PBII. Applied Surface Science, 280. 388-393 doi:10.1016/j.apsusc.2013.05.001 | ||
In | (n.d.) Applied Surface Science Vol. 280. Elsevier BV |
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