Reference Type | Journal (article/letter/editorial) |
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Title | Experimental determination of the temperature dependence of argon annealed fixed oxide charge at the Si/SiO2interface |
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Journal | Applied Physics Letters |
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Authors | Akinwande, A. I. | Author |
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Ho, C. P. | Author |
Plummer, J. D. | Author |
Year | 1984 (August) | Volume | 45 |
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Issue | 3 |
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Publisher | AIP Publishing |
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DOI | doi:10.1063/1.95165Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 8474313 | Long-form Identifier | mindat:1:5:8474313:6 |
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GUID | 0 |
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Full Reference | Akinwande, A. I., Ho, C. P., Plummer, J. D. (1984) Experimental determination of the temperature dependence of argon annealed fixed oxide charge at the Si/SiO2interface. Applied Physics Letters, 45 (3). 263-265 doi:10.1063/1.95165 |
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Plain Text | Akinwande, A. I., Ho, C. P., Plummer, J. D. (1984) Experimental determination of the temperature dependence of argon annealed fixed oxide charge at the Si/SiO2interface. Applied Physics Letters, 45 (3). 263-265 doi:10.1063/1.95165 |
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In | (1984, August) Applied Physics Letters Vol. 45 (3) AIP Publishing |
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