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Liang, Zhongning, Mo, Dang (1988) Ellipsometric spectra of silicon‐on‐insulator wafers. Applied Physics Letters, 52 (13). 1050-1052 doi:10.1063/1.99207

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Reference TypeJournal (article/letter/editorial)
TitleEllipsometric spectra of silicon‐on‐insulator wafers
JournalApplied Physics Letters
AuthorsLiang, ZhongningAuthor
Mo, DangAuthor
Year1988 (March 28)Volume52
Issue13
PublisherAIP Publishing
DOIdoi:10.1063/1.99207Search in ResearchGate
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Mindat Ref. ID8482614Long-form Identifiermindat:1:5:8482614:7
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Full ReferenceLiang, Zhongning, Mo, Dang (1988) Ellipsometric spectra of silicon‐on‐insulator wafers. Applied Physics Letters, 52 (13). 1050-1052 doi:10.1063/1.99207
Plain TextLiang, Zhongning, Mo, Dang (1988) Ellipsometric spectra of silicon‐on‐insulator wafers. Applied Physics Letters, 52 (13). 1050-1052 doi:10.1063/1.99207
In(1988, March) Applied Physics Letters Vol. 52 (13) AIP Publishing

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Maszara, W. P., Goetz, G., Caviglia, A., McKitterick, J. B. (1988) Bonding of silicon wafers for silicon‐on‐insulator. Journal of Applied Physics, 64 (10). 4943-4950 doi:10.1063/1.342443
Freeouf, J. L., Braslau, N., Wittmer, M. (1993) Lifetime measurements on silicon‐on‐insulator wafers. Applied Physics Letters, 63 (2). 189-190 doi:10.1063/1.110395
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Bunker, S. N., Sioshansi, P., Sanfacon, M. M., Tobin, S. P. (1987) Nondestructive analysis of silicon‐on‐insulator wafers. Applied Physics Letters, 50 (26). 1900-1902 doi:10.1063/1.97680
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