Cheng, J. Y., Chen, L. J. (1990) Formation of amorphous interlayers by a solid‐state diffusion in Zr and Hf thin films on silicon. Applied Physics Letters, 56 (5). 457-459 doi:10.1063/1.102764
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Formation of amorphous interlayers by a solid‐state diffusion in Zr and Hf thin films on silicon | ||
Journal | Applied Physics Letters | ||
Authors | Cheng, J. Y. | Author | |
Chen, L. J. | Author | ||
Year | 1990 (January 29) | Volume | 56 |
Issue | 5 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.102764Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8491018 | Long-form Identifier | mindat:1:5:8491018:1 |
GUID | 0 | ||
Full Reference | Cheng, J. Y., Chen, L. J. (1990) Formation of amorphous interlayers by a solid‐state diffusion in Zr and Hf thin films on silicon. Applied Physics Letters, 56 (5). 457-459 doi:10.1063/1.102764 | ||
Plain Text | Cheng, J. Y., Chen, L. J. (1990) Formation of amorphous interlayers by a solid‐state diffusion in Zr and Hf thin films on silicon. Applied Physics Letters, 56 (5). 457-459 doi:10.1063/1.102764 | ||
In | (1990, January) Applied Physics Letters Vol. 56 (5) AIP Publishing |
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