Reference Type | Journal (article/letter/editorial) |
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Title | Control of hydrocarbon radicals and film deposition by using a whistler wave discharge in range of radio frequency |
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Journal | Applied Physics Letters |
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Authors | Mieno, T. | Author |
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Shoji, T. | Author |
Kadota, K. | Author |
Year | 1991 (November 18) | Volume | 59 |
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Issue | 21 |
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Publisher | AIP Publishing |
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DOI | doi:10.1063/1.105903Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 8496465 | Long-form Identifier | mindat:1:5:8496465:0 |
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GUID | 0 |
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Full Reference | Mieno, T., Shoji, T., Kadota, K. (1991) Control of hydrocarbon radicals and film deposition by using a whistler wave discharge in range of radio frequency. Applied Physics Letters, 59 (21). 2675-2677 doi:10.1063/1.105903 |
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Plain Text | Mieno, T., Shoji, T., Kadota, K. (1991) Control of hydrocarbon radicals and film deposition by using a whistler wave discharge in range of radio frequency. Applied Physics Letters, 59 (21). 2675-2677 doi:10.1063/1.105903 |
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In | (1991, November) Applied Physics Letters Vol. 59 (21) AIP Publishing |
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