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Bai, K. H., Lee, D. S., Chang, H. Y., Uhm, H. S. (2002) Control and analysis of ion species in N2 inductively coupled plasma with inert gas mixing. Applied Physics Letters, 80 (21). 3907-3909 doi:10.1063/1.1479452

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Reference TypeJournal (article/letter/editorial)
TitleControl and analysis of ion species in N2 inductively coupled plasma with inert gas mixing
JournalApplied Physics Letters
AuthorsBai, K. H.Author
Lee, D. S.Author
Chang, H. Y.Author
Uhm, H. S.Author
Year2002 (May 27)Volume80
Issue21
PublisherAIP Publishing
DOIdoi:10.1063/1.1479452Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID8532093Long-form Identifiermindat:1:5:8532093:2
GUID0
Full ReferenceBai, K. H., Lee, D. S., Chang, H. Y., Uhm, H. S. (2002) Control and analysis of ion species in N2 inductively coupled plasma with inert gas mixing. Applied Physics Letters, 80 (21). 3907-3909 doi:10.1063/1.1479452
Plain TextBai, K. H., Lee, D. S., Chang, H. Y., Uhm, H. S. (2002) Control and analysis of ion species in N2 inductively coupled plasma with inert gas mixing. Applied Physics Letters, 80 (21). 3907-3909 doi:10.1063/1.1479452
In(2002, May) Applied Physics Letters Vol. 80 (21) AIP Publishing

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