Chim, W. K., Wong, K. M., Teo, Y. L., Lei, Y., Yeow, Y. T. (2002) Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation. Applied Physics Letters, 80 (25). 4837-4839 doi:10.1063/1.1487899
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation | ||
Journal | Applied Physics Letters | ||
Authors | Chim, W. K. | Author | |
Wong, K. M. | Author | ||
Teo, Y. L. | Author | ||
Lei, Y. | Author | ||
Yeow, Y. T. | Author | ||
Year | 2002 (June 24) | Volume | 80 |
Issue | 25 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.1487899Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8532351 | Long-form Identifier | mindat:1:5:8532351:3 |
GUID | 0 | ||
Full Reference | Chim, W. K., Wong, K. M., Teo, Y. L., Lei, Y., Yeow, Y. T. (2002) Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation. Applied Physics Letters, 80 (25). 4837-4839 doi:10.1063/1.1487899 | ||
Plain Text | Chim, W. K., Wong, K. M., Teo, Y. L., Lei, Y., Yeow, Y. T. (2002) Dopant extraction from scanning capacitance microscopy measurements of p-n junctions using combined inverse modeling and forward simulation. Applied Physics Letters, 80 (25). 4837-4839 doi:10.1063/1.1487899 | ||
In | (2002, June) Applied Physics Letters Vol. 80 (25) AIP Publishing |
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