Kim, Su Young, Kwon, Hyuk, Jo, Sang Jin, Ha, Jeong Sook, Park, Won Tae, Kang, Dong Kyun, Kim, Byong-Ho (2007) Effects of Al content on the electrical properties of LaxAlyOz films grown on TiN substrate by atomic layer deposition. Applied Physics Letters, 90 (10). 103104pp. doi:10.1063/1.2709951
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Effects of Al content on the electrical properties of LaxAlyOz films grown on TiN substrate by atomic layer deposition | ||
Journal | Applied Physics Letters | ||
Authors | Kim, Su Young | Author | |
Kwon, Hyuk | Author | ||
Jo, Sang Jin | Author | ||
Ha, Jeong Sook | Author | ||
Park, Won Tae | Author | ||
Kang, Dong Kyun | Author | ||
Kim, Byong-Ho | Author | ||
Year | 2007 (March 5) | Volume | 90 |
Issue | 10 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.2709951Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8552702 | Long-form Identifier | mindat:1:5:8552702:1 |
GUID | 0 | ||
Full Reference | Kim, Su Young, Kwon, Hyuk, Jo, Sang Jin, Ha, Jeong Sook, Park, Won Tae, Kang, Dong Kyun, Kim, Byong-Ho (2007) Effects of Al content on the electrical properties of LaxAlyOz films grown on TiN substrate by atomic layer deposition. Applied Physics Letters, 90 (10). 103104pp. doi:10.1063/1.2709951 | ||
Plain Text | Kim, Su Young, Kwon, Hyuk, Jo, Sang Jin, Ha, Jeong Sook, Park, Won Tae, Kang, Dong Kyun, Kim, Byong-Ho (2007) Effects of Al content on the electrical properties of LaxAlyOz films grown on TiN substrate by atomic layer deposition. Applied Physics Letters, 90 (10). 103104pp. doi:10.1063/1.2709951 | ||
In | (2007, March) Applied Physics Letters Vol. 90 (10) AIP Publishing |
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