Reference Type | Journal (article/letter/editorial) |
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Title | Suppressed growth of unstable low-k GeOx interlayer in Ge metal-oxide-semiconductor capacitor with high-k gate dielectric by annealing in water vapor |
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Journal | Applied Physics Letters |
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Authors | Zou, X. | Author |
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Xu, J. P. | Author |
Li, C. X. | Author |
Lai, P. T. | Author |
Year | 2007 (April 16) | Volume | 90 |
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Issue | 16 |
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Publisher | AIP Publishing |
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DOI | doi:10.1063/1.2723074Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 8553471 | Long-form Identifier | mindat:1:5:8553471:1 |
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GUID | 0 |
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Full Reference | Zou, X., Xu, J. P., Li, C. X., Lai, P. T. (2007) Suppressed growth of unstable low-k GeOx interlayer in Ge metal-oxide-semiconductor capacitor with high-k gate dielectric by annealing in water vapor. Applied Physics Letters, 90 (16). 163502pp. doi:10.1063/1.2723074 |
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Plain Text | Zou, X., Xu, J. P., Li, C. X., Lai, P. T. (2007) Suppressed growth of unstable low-k GeOx interlayer in Ge metal-oxide-semiconductor capacitor with high-k gate dielectric by annealing in water vapor. Applied Physics Letters, 90 (16). 163502pp. doi:10.1063/1.2723074 |
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In | (2007, April) Applied Physics Letters Vol. 90 (16) AIP Publishing |
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