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Janssen, G. C. A. M., Pujada, B. R. (2007) Elastic deformation of silicon (001) wafers due to thin film stresses. Applied Physics Letters, 91 (12). 121913pp. doi:10.1063/1.2787963

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Reference TypeJournal (article/letter/editorial)
TitleElastic deformation of silicon (001) wafers due to thin film stresses
JournalApplied Physics Letters
AuthorsJanssen, G. C. A. M.Author
Pujada, B. R.Author
Year2007 (September 17)Volume91
Issue12
PublisherAIP Publishing
DOIdoi:10.1063/1.2787963Search in ResearchGate
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Mindat Ref. ID8556049Long-form Identifiermindat:1:5:8556049:7
GUID0
Full ReferenceJanssen, G. C. A. M., Pujada, B. R. (2007) Elastic deformation of silicon (001) wafers due to thin film stresses. Applied Physics Letters, 91 (12). 121913pp. doi:10.1063/1.2787963
Plain TextJanssen, G. C. A. M., Pujada, B. R. (2007) Elastic deformation of silicon (001) wafers due to thin film stresses. Applied Physics Letters, 91 (12). 121913pp. doi:10.1063/1.2787963
In(2007, September) Applied Physics Letters Vol. 91 (12) AIP Publishing

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Jongste, J. F., Oosterlaken, T. G. M., Bart, G. C. J., Janssen, G. C. A. M., Radelaar, S. (1994) Deformation of Si(100) wafers during rapid thermal annealing. Journal of Applied Physics, 75 (6). 2830-2836 doi:10.1063/1.356175
Hunt, R A, Gale, B (1972) A model of deadherence due to stresses in an elastic film. Journal of Physics D: Applied Physics, 5. 359-372 doi:10.1088/0022-3727/5/2/318
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Wang, G., Leys, M. R., Loo, R., Richard, O., Bender, H., Waldron, N., Brammertz, G., Dekoster, J., Wang, W., Seefeldt, M., Caymax, M., Heyns, M. M. (2010) Selective area growth of high quality InP on Si (001) substrates. Applied Physics Letters, 97 (12). 121913pp. doi:10.1063/1.3491554
 
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