Yang, Z. C., Huang, A. P., Yan, L., Xiao, Z. S., Zhang, X. W., Chu, Paul K., Wang, W. W. (2009) Role of interface dipole in metal gate/high-k effective work function modulation by aluminum incorporation. Applied Physics Letters, 94 (25). 252905pp. doi:10.1063/1.3159830
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Role of interface dipole in metal gate/high-k effective work function modulation by aluminum incorporation | ||
Journal | Applied Physics Letters | ||
Authors | Yang, Z. C. | Author | |
Huang, A. P. | Author | ||
Yan, L. | Author | ||
Xiao, Z. S. | Author | ||
Zhang, X. W. | Author | ||
Chu, Paul K. | Author | ||
Wang, W. W. | Author | ||
Year | 2009 (June 22) | Volume | 94 |
Issue | 25 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.3159830Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8575255 | Long-form Identifier | mindat:1:5:8575255:7 |
GUID | 0 | ||
Full Reference | Yang, Z. C., Huang, A. P., Yan, L., Xiao, Z. S., Zhang, X. W., Chu, Paul K., Wang, W. W. (2009) Role of interface dipole in metal gate/high-k effective work function modulation by aluminum incorporation. Applied Physics Letters, 94 (25). 252905pp. doi:10.1063/1.3159830 | ||
Plain Text | Yang, Z. C., Huang, A. P., Yan, L., Xiao, Z. S., Zhang, X. W., Chu, Paul K., Wang, W. W. (2009) Role of interface dipole in metal gate/high-k effective work function modulation by aluminum incorporation. Applied Physics Letters, 94 (25). 252905pp. doi:10.1063/1.3159830 | ||
In | (2009, June) Applied Physics Letters Vol. 94 (25) AIP Publishing |
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