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Koutsoureli, M., Tavassolian, N., Papaioannou, G., Papapolymerou, J. (2011) Dielectric charging in capacitive microelectromechanical system switches with silicon nitride. Applied Physics Letters, 98 (9). 93505pp. doi:10.1063/1.3560465

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Reference TypeJournal (article/letter/editorial)
TitleDielectric charging in capacitive microelectromechanical system switches with silicon nitride
JournalApplied Physics Letters
AuthorsKoutsoureli, M.Author
Tavassolian, N.Author
Papaioannou, G.Author
Papapolymerou, J.Author
Year2011 (February 28)Volume98
Issue9
PublisherAIP Publishing
DOIdoi:10.1063/1.3560465Search in ResearchGate
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Mindat Ref. ID8595344Long-form Identifiermindat:1:5:8595344:8
GUID0
Full ReferenceKoutsoureli, M., Tavassolian, N., Papaioannou, G., Papapolymerou, J. (2011) Dielectric charging in capacitive microelectromechanical system switches with silicon nitride. Applied Physics Letters, 98 (9). 93505pp. doi:10.1063/1.3560465
Plain TextKoutsoureli, M., Tavassolian, N., Papaioannou, G., Papapolymerou, J. (2011) Dielectric charging in capacitive microelectromechanical system switches with silicon nitride. Applied Physics Letters, 98 (9). 93505pp. doi:10.1063/1.3560465
In(2011, February) Applied Physics Letters Vol. 98 (9) AIP Publishing

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Koutsoureli, M., Papaioannou, G. (2011) Determination of long time discharge current in microelectromechanical system capacitive switches. Applied Physics Letters, 99 (10). 103503pp. doi:10.1063/1.3636405
Papaioannou, G., Papapolymerou, J., Pons, P., Plana, R. (2007) Dielectric charging in radio frequency microelectromechanical system capacitive switches: A study of material properties and device performance. Applied Physics Letters, 90 (23). 233507pp. doi:10.1063/1.2746056
Papaioannou, G., Giacomozzi, F., Papandreou, E., Margesin, B. (2011) Floating electrode microelectromechanical system capacitive switches: A different actuation mechanism. Applied Physics Letters, 99 (7). 73501pp. doi:10.1063/1.3624830
Papaioannou, G. J., Exarchos, M., Theonas, V., Psychias, J., Konstantinidis, G., Vasilache, D., Muller, A., Neculoiu, D. (2006) Effect of space charge polarization in radio frequency microelectromechanical system capacitive switch dielectric charging. Applied Physics Letters, 89 (10). 103512pp. doi:10.1063/1.2347278
Koutsoureli, M., Reig, B., Papandreou, E., Poulain, C., Souchon, F., Deborgies, F., Papaioannou, G. (2016) Field emission in actuation pads of radio frequency microelectromechanical systems ohmic switches: A potential contamination mechanism. Applied Physics Letters, 108 (4). 43506pp. doi:10.1063/1.4940115
Jain, Ankit, Nair, Pradeep R., Alam, Muhammad A. (2011) Strategies for dynamic soft-landing in capacitive microelectromechanical switches. Applied Physics Letters, 98 (23). 234104pp. doi:10.1063/1.3598960
Molinero, D., Comulada, R., Castañer, L. (2006) Dielectric charge measurements in capacitive microelectromechanical switches. Applied Physics Letters, 89 (10). 103506pp. doi:10.1063/1.2335799
Venkattraman, A., Garg, A., Peroulis, D., Alexeenko, A. A. (2012) Direct measurements and numerical simulations of gas charging in microelectromechanical system capacitive switches. Applied Physics Letters, 100 (8). 83503pp. doi:10.1063/1.3688176
Molinero, David, Castaner, Luis (2010) Dielectric charging characterization on microelectromechanical switches by discharge current transient. Applied Physics Letters, 96 (18). 183503pp. doi:10.1063/1.3427363
Molinero, D., Castañer, L. (2008) Comparison of air gap breakdown and substrate injection as mechanisms to induce dielectric charging in microelectromechanical switches. Applied Physics Letters, 92 (4). 43502pp. doi:10.1063/1.2837615
Molinero, D., Castañer, L. (2009) Modeling and measuring transient discharge current of microelectromechanical switches after dielectric charging by voltage stress. Applied Physics Letters, 94 (4). 43503pp. doi:10.1063/1.3075573
 
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