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Britun, Nikolay, Palmucci, Maria, Snyders, Rony (2011) Fast relaxation of the velocity distribution function of neutral and ionized species in high-power impulse magnetron sputtering. Applied Physics Letters, 99 (13). 131504pp. doi:10.1063/1.3644989

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Reference TypeJournal (article/letter/editorial)
TitleFast relaxation of the velocity distribution function of neutral and ionized species in high-power impulse magnetron sputtering
JournalApplied Physics Letters
AuthorsBritun, NikolayAuthor
Palmucci, MariaAuthor
Snyders, RonyAuthor
Year2011 (September 26)Volume99
Issue13
PublisherAIP Publishing
DOIdoi:10.1063/1.3644989Search in ResearchGate
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Mindat Ref. ID8596241Long-form Identifiermindat:1:5:8596241:9
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Full ReferenceBritun, Nikolay, Palmucci, Maria, Snyders, Rony (2011) Fast relaxation of the velocity distribution function of neutral and ionized species in high-power impulse magnetron sputtering. Applied Physics Letters, 99 (13). 131504pp. doi:10.1063/1.3644989
Plain TextBritun, Nikolay, Palmucci, Maria, Snyders, Rony (2011) Fast relaxation of the velocity distribution function of neutral and ionized species in high-power impulse magnetron sputtering. Applied Physics Letters, 99 (13). 131504pp. doi:10.1063/1.3644989
In(2011, September) Applied Physics Letters Vol. 99 (13) AIP Publishing

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Palmucci, Maria, Britun, Nikolay, Konstantinidis, Stephanos, Snyders, Rony (2013) Rarefaction windows in a high-power impulse magnetron sputtering plasma. Journal of Applied Physics, 114 (11). 113302pp. doi:10.1063/1.4821514
Britun, Nikolay, Palmucci, Maria, Konstantinidis, Stephanos, Snyders, Rony (2015) Particle visualization in high-power impulse magnetron sputtering. I. 2D density mapping. Journal of Applied Physics, 117 (16). 163302pp. doi:10.1063/1.4919006
Britun, Nikolay, Palmucci, Maria, Konstantinidis, Stephanos, Snyders, Rony (2015) Particle visualization in high-power impulse magnetron sputtering. II. Absolute density dynamics. Journal of Applied Physics, 117 (16). 163303pp. doi:10.1063/1.4919007
Britun, Nikolay, Palmucci, Maria, Konstantinidis, Stephanos, Gaillard, Mireille, Snyders, Rony (2013) Time-resolved temperature study in a high-power impulse magnetron sputtering discharge. Journal of Applied Physics, 114 (1). 13301pp. doi:10.1063/1.4812579
Britun, Nikolay, Belosludtsev, Alexandr, Silva, Tiago, Snyders, Rony (2017) Ground state atomic oxygen in high-power impulse magnetron sputtering: a quantitative study. Journal of Physics D: Applied Physics, 50. 75204pp. doi:10.1088/1361-6463/aa560c
Palmucci, Maria, Britun, Nikolay, Silva, Tiago, Snyders, Rony, Konstantinidis, Stephanos (2013) Mass spectrometry diagnostics of short-pulsed HiPIMS discharges. Journal of Physics D: Applied Physics, 46. 215201pp. doi:10.1088/0022-3727/46/21/215201
Britun, N., Han, J. G., Oh, S.-G. (2008) Velocity distribution of neutral species during magnetron sputtering by Fabry–Perot interferometry. Applied Physics Letters, 92 (14). 141503pp. doi:10.1063/1.2907505
Britun, Nikolay, Godfroid, Thomas, Konstantinidis, Stephanos, Snyders, Rony (2011) Time-resolved gas temperature evolution in pulsed Ar–N2 microwave discharge. Applied Physics Letters, 98 (14). 141502pp. doi:10.1063/1.3576928
Britun, Nikolay, Palmucci, Maria, Konstantinidis, Stephanos, Snyders, and Rony (2012) Time-resolved laser-induced fluorescence diagnostics in a HIPIMS discharge. IOP Conference Series: Materials Science and Engineering, 39. 12013pp. doi:10.1088/1757-899x/39/1/012013
Britun, Nikolay, Konstantinidis, Stephanos, Belosludtsev, Alexandr, Silva, Tiago, Snyders, Rony (2017) Quantification of the hysteresis and related phenomena in reactive HiPIMS discharges. Journal of Applied Physics, 121 (17). 171905pp. doi:10.1063/1.4977819
Britun, N., Michiels, M., Godfroid, T., Snyders, R. (2018) Ion density evolution in a high-power sputtering discharge with bipolar pulsing. Applied Physics Letters, 112 (23). 234103pp. doi:10.1063/1.5030697
 
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