Britun, N., Michiels, M., Godfroid, T., Snyders, R. (2018) Ion density evolution in a high-power sputtering discharge with bipolar pulsing. Applied Physics Letters, 112 (23). 234103pp. doi:10.1063/1.5030697
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Ion density evolution in a high-power sputtering discharge with bipolar pulsing | ||
| Journal | Applied Physics Letters | ||
| Authors | Britun, N. | Author | |
| Michiels, M. | Author | ||
| Godfroid, T. | Author | ||
| Snyders, R. | Author | ||
| Year | 2018 (June 4) | Volume | 112 |
| Issue | 23 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.5030697Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 8652406 | Long-form Identifier | mindat:1:5:8652406:7 |
| GUID | 0 | ||
| Full Reference | Britun, N., Michiels, M., Godfroid, T., Snyders, R. (2018) Ion density evolution in a high-power sputtering discharge with bipolar pulsing. Applied Physics Letters, 112 (23). 234103pp. doi:10.1063/1.5030697 | ||
| Plain Text | Britun, N., Michiels, M., Godfroid, T., Snyders, R. (2018) Ion density evolution in a high-power sputtering discharge with bipolar pulsing. Applied Physics Letters, 112 (23). 234103pp. doi:10.1063/1.5030697 | ||
| In | (2018, June) Applied Physics Letters Vol. 112 (23) AIP Publishing | ||
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