Li, W., Pei, D., Guo, X., Cheng, M. K., Lee, S., Lin, Q., King, S. W., Shohet, J. L. (2016) Effects of cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films. Applied Physics Letters, 108 (20). 202901pp. doi:10.1063/1.4950717
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Effects of cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films | ||
Journal | Applied Physics Letters | ||
Authors | Li, W. | Author | |
Pei, D. | Author | ||
Guo, X. | Author | ||
Cheng, M. K. | Author | ||
Lee, S. | Author | ||
Lin, Q. | Author | ||
King, S. W. | Author | ||
Shohet, J. L. | Author | ||
Year | 2016 (May 16) | Volume | 108 |
Issue | 20 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.4950717Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8640400 | Long-form Identifier | mindat:1:5:8640400:0 |
GUID | 0 | ||
Full Reference | Li, W., Pei, D., Guo, X., Cheng, M. K., Lee, S., Lin, Q., King, S. W., Shohet, J. L. (2016) Effects of cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films. Applied Physics Letters, 108 (20). 202901pp. doi:10.1063/1.4950717 | ||
Plain Text | Li, W., Pei, D., Guo, X., Cheng, M. K., Lee, S., Lin, Q., King, S. W., Shohet, J. L. (2016) Effects of cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films. Applied Physics Letters, 108 (20). 202901pp. doi:10.1063/1.4950717 | ||
In | (2016, May) Applied Physics Letters Vol. 108 (20) AIP Publishing |
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