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Yuehui, Yu, Xianghuai, Liu, Ziwei, Fang, Shichang, Zou (1989) Optical properties and microstructure of silicon nitride film synthesized by ion beam enhanced deposition. Applied Surface Science, 40. 145-150 doi:10.1016/0169-4332(89)90169-4

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Reference TypeJournal (article/letter/editorial)
TitleOptical properties and microstructure of silicon nitride film synthesized by ion beam enhanced deposition
JournalApplied Surface Science
AuthorsYuehui, YuAuthor
Xianghuai, LiuAuthor
Ziwei, FangAuthor
Shichang, ZouAuthor
Year1989 (November)Volume40
PublisherElsevier BV
DOIdoi:10.1016/0169-4332(89)90169-4Search in ResearchGate
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Mindat Ref. ID9894859Long-form Identifiermindat:1:5:9894859:8
GUID0
Full ReferenceYuehui, Yu, Xianghuai, Liu, Ziwei, Fang, Shichang, Zou (1989) Optical properties and microstructure of silicon nitride film synthesized by ion beam enhanced deposition. Applied Surface Science, 40. 145-150 doi:10.1016/0169-4332(89)90169-4
Plain TextYuehui, Yu, Xianghuai, Liu, Ziwei, Fang, Shichang, Zou (1989) Optical properties and microstructure of silicon nitride film synthesized by ion beam enhanced deposition. Applied Surface Science, 40. 145-150 doi:10.1016/0169-4332(89)90169-4
In(n.d.) Applied Surface Science Vol. 40. Elsevier BV

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Xianghuai, Liu, Bin, Xue, Zhihong, Zheng, Zuyao, Zhou, Shichang, Zou (1989) Synthesis of silicon nitride films by ion beam enhanced deposition. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 185-189 doi:10.1016/0168-583x(89)90768-4
Wu, Zhaocu, Yu, Yuehui, Liu, Xianghuai (1996) Characteristics of carbon nitride films synthesized by single‐source ion beam enhanced deposition system. Applied Physics Letters, 68 (9). 1291-1293 doi:10.1063/1.115956
Jiankun, Zhou, Youshan, Chen, Xianghuai, Liu, Shichang, Zou (1989) Computer simulation of ion beam enhanced deposition of silicon nitride films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 182-184 doi:10.1016/0168-583x(89)90767-2
Galuska, A.A. (1989) Ion-enhanced adhesion of Ni films on glassy carbon. Applied Surface Science, 40. 19-31 doi:10.1016/0169-4332(89)90155-4
Genqing, Yang, Binyao, Jiang, Wei, Zhou, Xianghuai, Liu, Shichang, Zou (1989) Dynamic implantation model of ion beam enhanced deposition. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 424-428 doi:10.1016/0168-583x(89)90217-6
Galuska, A.A. (1989) Ion-enhanced adhesion of Ni films on glassy carbon. Applied Surface Science, 40. 33-40 doi:10.1016/0169-4332(89)90156-6
Xianghuai, Liu, Jiankun, Zhou, Shichang, Zou, Taniguchi, S., Schröer, A., Wolf, G.K. (1991) Synthesis of gradient thin films by ion beam enhanced deposition. Materials Science and Engineering: A, 139. 220-224 doi:10.1016/0921-5093(91)90620-3
Galuska, A.A. (1989) Ion-enhanced adhesion of Ni films on glassy carbon. Applied Surface Science, 40. 41-51 doi:10.1016/0169-4332(89)90157-8
Yuehui, Yu, Ziwei, Fang, Chenglu, Lin, Shichang, Zou, Hemment, P.L.F. (1989) Infrared absorption and reflection spectroscopic studies of SOI structures formed by oxygen or nitrogen implantation. Materials Letters, 8. 95-100 doi:10.1016/0167-577x(89)90135-3
Young, N.D., Gill, A. (1989) Mobile ion instabilities in polycrystalline silicon thin film transistors. Applied Surface Science, 39. 364-367 doi:10.1016/0169-4332(89)90451-0
Yuehui, Yu, Xianghuai, Liu, Shichang, Zou, Hemment, P.L.F. (1995) Optical characterization of doped top layers in SOI structures formed by ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 106 (1). 452-456 doi:10.1016/0168-583x(95)00751-2
 
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