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Piglmayer, K, Schieche, H (1997) Laser-induced etching of tungsten. Applied Surface Science, 109. 184-188 doi:10.1016/s0169-4332(96)00657-5

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Reference TypeJournal (article/letter/editorial)
TitleLaser-induced etching of tungsten
JournalApplied Surface Science
AuthorsPiglmayer, KAuthor
Schieche, HAuthor
Year1997 (February)Volume109
PublisherElsevier BV
DOIdoi:10.1016/s0169-4332(96)00657-5Search in ResearchGate
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Mindat Ref. ID9899076Long-form Identifiermindat:1:5:9899076:8
GUID0
Full ReferencePiglmayer, K, Schieche, H (1997) Laser-induced etching of tungsten. Applied Surface Science, 109. 184-188 doi:10.1016/s0169-4332(96)00657-5
Plain TextPiglmayer, K, Schieche, H (1997) Laser-induced etching of tungsten. Applied Surface Science, 109. 184-188 doi:10.1016/s0169-4332(96)00657-5
In(n.d.) Applied Surface Science Vol. 109. Elsevier BV

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Schieche, H., Piglmayer, K. (1999) On the dynamics of laser-induced etching of tungsten–SiO2-composites. Applied Surface Science, 138. 280-284 doi:10.1016/s0169-4332(98)00408-5
Tóth, Z., Piglmayer, K. (2002) Laser-induced local CVD and simultaneous etching of tungsten. Applied Surface Science, 186. 184-189 doi:10.1016/s0169-4332(01)00621-3
Piglmayer, K (1997) Modelling of pyrolytic laser-induced deposition. Applied Surface Science, 109. 453-456 doi:10.1016/s0169-4332(96)00920-8
Piglmayer, K, Schieche, H, Chabicovsky, R (2000) On the reaction mechanism in laser-induced deposition of tungsten microstructures from WF6/H2. Applied Surface Science, 154. 365-368 doi:10.1016/s0169-4332(99)00424-9
Tóth, Z., Bereznai, M., Piglmayer, K. (2003) Laser-induced etching of tungsten and fused silica in WF6. Applied Surface Science, 208. 205-209 doi:10.1016/s0169-4332(02)01373-9
Piglmayer, K., Stenberg, G., Boman, M. (1997) Laser-assisted deposition of a-C:H at room temperature: experiment and theory. Applied Surface Science, 109. 449-452 doi:10.1016/s0169-4332(96)00919-1
Köster, H, Mann, K (1997) Influence of beam parameters on the laser induced particle emission from surfaces. Applied Surface Science, 109. 428-432 doi:10.1016/s0169-4332(96)00780-5
Piglmayer, K., Toth, Z., Kantor, Z. (1995) Laser-induced etching and deposition of tungsten in WF6-H2 atmosphere. Applied Surface Science, 86. 484-487 doi:10.1016/0169-4332(94)00434-x
Révész, K, Hopp, B, Bor, Z (1997) Excimer laser induced surface chemical modification of polytetrafluoroethylene. Applied Surface Science, 109. 222-226 doi:10.1016/s0169-4332(96)00662-9
Pfleging, W., Vörckel, A., Duddek, H., Wesner, D.A., Kreutz, E.W. (1997) Excimer-laser patterning of copper in LDE (laser dry etching). Applied Surface Science, 109. 194-200 doi:10.1016/s0169-4332(96)00659-9
Stenberg, Göran, Piglmayer, Klaus, Boman, Mats, Carlsson, Jan-Otto (1997) Laser assisted chemical vapour deposition of hydrogen containing amorphous carbon at room temperature. Applied Surface Science, 109. 549-553 doi:10.1016/s0169-4332(96)00911-7
 
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