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Piglmayer, K, Schieche, H, Chabicovsky, R (2000) On the reaction mechanism in laser-induced deposition of tungsten microstructures from WF6/H2. Applied Surface Science, 154. 365-368 doi:10.1016/s0169-4332(99)00424-9

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Reference TypeJournal (article/letter/editorial)
TitleOn the reaction mechanism in laser-induced deposition of tungsten microstructures from WF6/H2
JournalApplied Surface Science
AuthorsPiglmayer, KAuthor
Schieche, HAuthor
Chabicovsky, RAuthor
Year2000 (February)Volume154
PublisherElsevier BV
DOIdoi:10.1016/s0169-4332(99)00424-9Search in ResearchGate
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Mindat Ref. ID9901671Long-form Identifiermindat:1:5:9901671:7
GUID0
Full ReferencePiglmayer, K, Schieche, H, Chabicovsky, R (2000) On the reaction mechanism in laser-induced deposition of tungsten microstructures from WF6/H2. Applied Surface Science, 154. 365-368 doi:10.1016/s0169-4332(99)00424-9
Plain TextPiglmayer, K, Schieche, H, Chabicovsky, R (2000) On the reaction mechanism in laser-induced deposition of tungsten microstructures from WF6/H2. Applied Surface Science, 154. 365-368 doi:10.1016/s0169-4332(99)00424-9
In(n.d.) Applied Surface Science Vol. 154. Elsevier BV

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Piglmayer, K, Schieche, H (1997) Laser-induced etching of tungsten. Applied Surface Science, 109. 184-188 doi:10.1016/s0169-4332(96)00657-5
Schieche, H., Piglmayer, K. (1999) On the dynamics of laser-induced etching of tungsten–SiO2-composites. Applied Surface Science, 138. 280-284 doi:10.1016/s0169-4332(98)00408-5
Piglmayer, K., Toth, Z., Kantor, Z. (1995) Laser-induced etching and deposition of tungsten in WF6-H2 atmosphere. Applied Surface Science, 86. 484-487 doi:10.1016/0169-4332(94)00434-x
TĂłth, Z., Bereznai, M., Piglmayer, K. (2003) Laser-induced etching of tungsten and fused silica in WF6. Applied Surface Science, 208. 205-209 doi:10.1016/s0169-4332(02)01373-9
Piglmayer, K (1997) Modelling of pyrolytic laser-induced deposition. Applied Surface Science, 109. 453-456 doi:10.1016/s0169-4332(96)00920-8
TĂłth, Z., Piglmayer, K. (2002) Laser-induced local CVD and simultaneous etching of tungsten. Applied Surface Science, 186. 184-189 doi:10.1016/s0169-4332(01)00621-3
Tabbal, Malek, Izquierdo, Ricardo, Meunier, Michel, PĂ©pin, Corinne, Yelon, Arthur (1997) Surface characterization of excimer laser induced deposition of W on GaAs from WF6 and H2. Applied Surface Science, 108. 417-424 doi:10.1016/s0169-4332(96)00691-5
Henyk, M, Mitzner, R, Wolfframm, D, Reif, J (2000) Laser-induced ion emission from dielectrics. Applied Surface Science, 154. 249-255 doi:10.1016/s0169-4332(99)00377-3
Lindstam, Mikael, Boman, Mats, Piglmayer, Klaus (1999) DUV laser-induced deposition of a-C:H from CH2I2 at room temperature. Applied Surface Science, 138. 413-417 doi:10.1016/s0169-4332(98)00434-6
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