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Jung, Hae-Suk, Park, Hyung-Ho (2003) Correlation between deposition parameters and structural modification of amorphous carbon nitride (a-CNx) film in magnetron sputtering. Applied Surface Science, 216. 149-155 doi:10.1016/s0169-4332(03)00507-5

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Reference TypeJournal (article/letter/editorial)
TitleCorrelation between deposition parameters and structural modification of amorphous carbon nitride (a-CNx) film in magnetron sputtering
JournalApplied Surface Science
AuthorsJung, Hae-SukAuthor
Park, Hyung-HoAuthor
Year2003 (June)Volume216
PublisherElsevier BV
DOIdoi:10.1016/s0169-4332(03)00507-5Search in ResearchGate
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Mindat Ref. ID9905352Long-form Identifiermindat:1:5:9905352:3
GUID0
Full ReferenceJung, Hae-Suk, Park, Hyung-Ho (2003) Correlation between deposition parameters and structural modification of amorphous carbon nitride (a-CNx) film in magnetron sputtering. Applied Surface Science, 216. 149-155 doi:10.1016/s0169-4332(03)00507-5
Plain TextJung, Hae-Suk, Park, Hyung-Ho (2003) Correlation between deposition parameters and structural modification of amorphous carbon nitride (a-CNx) film in magnetron sputtering. Applied Surface Science, 216. 149-155 doi:10.1016/s0169-4332(03)00507-5
In(n.d.) Applied Surface Science Vol. 216. Elsevier BV

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Fitzgerald, A.G, Jiang, Liudi, Rose, M.J, Dines, T.J (2001) Microstructural properties of amorphous carbon nitride films synthesised by dc magnetron sputtering. Applied Surface Science, 175. 525-530 doi:10.1016/s0169-4332(01)00107-6
Jung, Yeon Sik, Lee, Dong Wook, Jeon, Duk Young (2004) Influence of dc magnetron sputtering parameters on surface morphology of indium tin oxide thin films. Applied Surface Science, 221. 136-142 doi:10.1016/s0169-4332(03)00862-6
Jung, Hae-Suk, Park, Hyung-Ho, Mendieta, I. R., Smith, D. A. (2003) Enhancement of sp[sup 3] hybridized C in amorphous carbon films by Ar ion bombardment and Si incorporation. Journal of Applied Physics, 94 (8). 4828pp. doi:10.1063/1.1606511
(2003) Editorial Board. Applied Surface Science, 216. doi:10.1016/s0169-4332(03)00776-1
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