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Park, Sung-Woo, Jung, Sang-Bae, Kang, Min-Gu, Park, Hyung-Ho, Kim, Hae-Cheon (2003) Modification of GaAs and copper surface by the formation of SiO2 aerogel film as an interlayer dielectric. Applied Surface Science, 216. 98-105 doi:10.1016/s0169-4332(03)00488-4

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Reference TypeJournal (article/letter/editorial)
TitleModification of GaAs and copper surface by the formation of SiO2 aerogel film as an interlayer dielectric
JournalApplied Surface Science
AuthorsPark, Sung-WooAuthor
Jung, Sang-BaeAuthor
Kang, Min-GuAuthor
Park, Hyung-HoAuthor
Kim, Hae-CheonAuthor
Year2003 (June)Volume216
PublisherElsevier BV
DOIdoi:10.1016/s0169-4332(03)00488-4Search in ResearchGate
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Mindat Ref. ID9905336Long-form Identifiermindat:1:5:9905336:5
GUID0
Full ReferencePark, Sung-Woo, Jung, Sang-Bae, Kang, Min-Gu, Park, Hyung-Ho, Kim, Hae-Cheon (2003) Modification of GaAs and copper surface by the formation of SiO2 aerogel film as an interlayer dielectric. Applied Surface Science, 216. 98-105 doi:10.1016/s0169-4332(03)00488-4
Plain TextPark, Sung-Woo, Jung, Sang-Bae, Kang, Min-Gu, Park, Hyung-Ho, Kim, Hae-Cheon (2003) Modification of GaAs and copper surface by the formation of SiO2 aerogel film as an interlayer dielectric. Applied Surface Science, 216. 98-105 doi:10.1016/s0169-4332(03)00488-4
In(n.d.) Applied Surface Science Vol. 216. Elsevier BV

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Jung, Sang-Bae, Park, Hyung-Ho, Kim, Haecheon (2003) The role of vacuum ultraviolet in H2 plasma treatment on SiO2 aerogel film. Applied Surface Science, 216. 156-162 doi:10.1016/s0169-4332(03)00508-7
Jung, Hae-Suk, Park, Hyung-Ho (2003) Correlation between deposition parameters and structural modification of amorphous carbon nitride (a-CNx) film in magnetron sputtering. Applied Surface Science, 216. 149-155 doi:10.1016/s0169-4332(03)00507-5
Shim, Kyung-Suk, Kim, Sung-Min, Bae, Sang Hyuck, Lee, Sang Yeol, Jung, Hae-suk, Park, Hyung-ho (2000) Fabrication and characterization of diamond-like carbon thin films by pulsed laser deposition. Applied Surface Science, 154. 482-484 doi:10.1016/s0169-4332(99)00401-8
Yang, Jun-Kyu, Kim, Woo Sik, Park, Hyung-Ho (2003) Interface-controlled Gd2O3/GaAs system for ferroelectric memory application. Applied Surface Science, 216. 203-207 doi:10.1016/s0169-4332(03)00434-3
Kim, Jung-Ho, Kim, Hong-Ryul, Park, Hyung-Ho, Hyun, Sang-Hoon (2001) Aging effect of SiO2 xerogel film on its microstructure and dielectric properties. Applied Surface Science, 169. 452-456 doi:10.1016/s0169-4332(00)00702-9
Park, Hyung-Sang, Min, Jae-Sik, Lim, Jung-Wook, Kang, Sang-Won (2000) Theoretical evaluation of film growth rate during atomic layer epitaxy. Applied Surface Science, 158. 81-91 doi:10.1016/s0169-4332(99)00580-2
Wang, Seok-Joo, Park, Hyung-Ho, Yeom, Geun-Young, Hyun, Sang-Hoon (2001) The effects of surface terminal bonds and microstructure of SiO2 aerogel films on dry etching. Applied Surface Science, 169. 457-462 doi:10.1016/s0169-4332(00)00703-0
Choe, Sang Joon, Kang, Hae Jin, Park, Dong Ho, Huh, Do Sung, Park, Jongkil (2001) Adsorption and dissociation reaction of carbon dioxide on Ni(1 1 1) surface: molecular orbital study. Applied Surface Science, 181. 265-276 doi:10.1016/s0169-4332(01)00398-1
Hirose, K, Kitahara, H, Hattori, T (2003) Characterization of dielectric properties of ultrathin SiO2 film formed on Si substrate. Applied Surface Science, 216. 351-355 doi:10.1016/s0169-4332(03)00426-4
Kim, Woo Sik, Yang, Jun-Kyu, Park, Hyung-Ho (2001) Influence of preferred orientation of lead zirconate titanate thin film on the ferroelectric properties. Applied Surface Science, 169. 549-552 doi:10.1016/s0169-4332(00)00733-9
Jo, Moon-Ho, Park, Hyung-Ho, Kim, Dong-Joon, Hyun, Sang-Hoon, Choi, Se-Young, Paik, Jong-Tae (1997) SiO2 aerogel film as a novel intermetal dielectric. Journal of Applied Physics, 82 (3). 1299-1304 doi:10.1063/1.365902
 
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